JPS576689B2 - - Google Patents

Info

Publication number
JPS576689B2
JPS576689B2 JP5469878A JP5469878A JPS576689B2 JP S576689 B2 JPS576689 B2 JP S576689B2 JP 5469878 A JP5469878 A JP 5469878A JP 5469878 A JP5469878 A JP 5469878A JP S576689 B2 JPS576689 B2 JP S576689B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5469878A
Other languages
Japanese (ja)
Other versions
JPS54146580A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5469878A priority Critical patent/JPS54146580A/en
Publication of JPS54146580A publication Critical patent/JPS54146580A/en
Publication of JPS576689B2 publication Critical patent/JPS576689B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP5469878A 1978-05-09 1978-05-09 Thin plate flattening correction mechanism Granted JPS54146580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5469878A JPS54146580A (en) 1978-05-09 1978-05-09 Thin plate flattening correction mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5469878A JPS54146580A (en) 1978-05-09 1978-05-09 Thin plate flattening correction mechanism

Publications (2)

Publication Number Publication Date
JPS54146580A JPS54146580A (en) 1979-11-15
JPS576689B2 true JPS576689B2 (en) 1982-02-06

Family

ID=12978016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5469878A Granted JPS54146580A (en) 1978-05-09 1978-05-09 Thin plate flattening correction mechanism

Country Status (1)

Country Link
JP (1) JPS54146580A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5772323A (en) * 1980-10-23 1982-05-06 Hitachi Ltd Thin plate flattening equipment
JPS5734336A (en) * 1980-08-11 1982-02-24 Hitachi Ltd Exposure device
JPS5815237A (en) * 1981-07-21 1983-01-28 Seiko Epson Corp Apparatus for manufacturing semiconductor
JPH0982606A (en) * 1995-09-13 1997-03-28 Nikon Corp Reticle holder
JP2003100619A (en) * 2001-09-27 2003-04-04 Nikon Corp Mask holding apparatus and method, and exposing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4888871A (en) * 1972-02-02 1973-11-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4888871A (en) * 1972-02-02 1973-11-21

Also Published As

Publication number Publication date
JPS54146580A (en) 1979-11-15

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