JPS576689B2 - - Google Patents
Info
- Publication number
- JPS576689B2 JPS576689B2 JP5469878A JP5469878A JPS576689B2 JP S576689 B2 JPS576689 B2 JP S576689B2 JP 5469878 A JP5469878 A JP 5469878A JP 5469878 A JP5469878 A JP 5469878A JP S576689 B2 JPS576689 B2 JP S576689B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5469878A JPS54146580A (en) | 1978-05-09 | 1978-05-09 | Thin plate flattening correction mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5469878A JPS54146580A (en) | 1978-05-09 | 1978-05-09 | Thin plate flattening correction mechanism |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54146580A JPS54146580A (en) | 1979-11-15 |
JPS576689B2 true JPS576689B2 (en) | 1982-02-06 |
Family
ID=12978016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5469878A Granted JPS54146580A (en) | 1978-05-09 | 1978-05-09 | Thin plate flattening correction mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54146580A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5772323A (en) * | 1980-10-23 | 1982-05-06 | Hitachi Ltd | Thin plate flattening equipment |
JPS5734336A (en) * | 1980-08-11 | 1982-02-24 | Hitachi Ltd | Exposure device |
JPS5815237A (en) * | 1981-07-21 | 1983-01-28 | Seiko Epson Corp | Apparatus for manufacturing semiconductor |
JPH0982606A (en) * | 1995-09-13 | 1997-03-28 | Nikon Corp | Reticle holder |
JP2003100619A (en) * | 2001-09-27 | 2003-04-04 | Nikon Corp | Mask holding apparatus and method, and exposing apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4888871A (en) * | 1972-02-02 | 1973-11-21 |
-
1978
- 1978-05-09 JP JP5469878A patent/JPS54146580A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4888871A (en) * | 1972-02-02 | 1973-11-21 |
Also Published As
Publication number | Publication date |
---|---|
JPS54146580A (en) | 1979-11-15 |