JPS5763410A - Measuring method and device for shape of plane pattern - Google Patents

Measuring method and device for shape of plane pattern

Info

Publication number
JPS5763410A
JPS5763410A JP55138906A JP13890680A JPS5763410A JP S5763410 A JPS5763410 A JP S5763410A JP 55138906 A JP55138906 A JP 55138906A JP 13890680 A JP13890680 A JP 13890680A JP S5763410 A JPS5763410 A JP S5763410A
Authority
JP
Japan
Prior art keywords
point
processing
pattern
plane pattern
function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55138906A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326426B2 (enrdf_load_stackoverflow
Inventor
Kenji Yamaguchi
Jiro Koga
Shigehisa Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP55138906A priority Critical patent/JPS5763410A/ja
Publication of JPS5763410A publication Critical patent/JPS5763410A/ja
Publication of JPS6326426B2 publication Critical patent/JPS6326426B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP55138906A 1980-10-03 1980-10-03 Measuring method and device for shape of plane pattern Granted JPS5763410A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55138906A JPS5763410A (en) 1980-10-03 1980-10-03 Measuring method and device for shape of plane pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55138906A JPS5763410A (en) 1980-10-03 1980-10-03 Measuring method and device for shape of plane pattern

Publications (2)

Publication Number Publication Date
JPS5763410A true JPS5763410A (en) 1982-04-16
JPS6326426B2 JPS6326426B2 (enrdf_load_stackoverflow) 1988-05-30

Family

ID=15232891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55138906A Granted JPS5763410A (en) 1980-10-03 1980-10-03 Measuring method and device for shape of plane pattern

Country Status (1)

Country Link
JP (1) JPS5763410A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6429702A (en) * 1987-07-24 1989-01-31 Hamamatsu Photonics Kk Shape measuring instrument

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6354508U (enrdf_load_stackoverflow) * 1986-09-30 1988-04-12

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146840A (en) * 1974-10-18 1976-04-21 Shindengen Electric Mfg Mojininshikisochi
JPS5583978A (en) * 1978-12-20 1980-06-24 Matsushita Electric Ind Co Ltd Pattern recognizer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146840A (en) * 1974-10-18 1976-04-21 Shindengen Electric Mfg Mojininshikisochi
JPS5583978A (en) * 1978-12-20 1980-06-24 Matsushita Electric Ind Co Ltd Pattern recognizer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6429702A (en) * 1987-07-24 1989-01-31 Hamamatsu Photonics Kk Shape measuring instrument

Also Published As

Publication number Publication date
JPS6326426B2 (enrdf_load_stackoverflow) 1988-05-30

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