JPS5763410A - Measuring method and device for shape of plane pattern - Google Patents

Measuring method and device for shape of plane pattern

Info

Publication number
JPS5763410A
JPS5763410A JP55138906A JP13890680A JPS5763410A JP S5763410 A JPS5763410 A JP S5763410A JP 55138906 A JP55138906 A JP 55138906A JP 13890680 A JP13890680 A JP 13890680A JP S5763410 A JPS5763410 A JP S5763410A
Authority
JP
Japan
Prior art keywords
point
processing
pattern
plane pattern
function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55138906A
Other languages
Japanese (ja)
Other versions
JPS6326426B2 (en
Inventor
Kenji Yamaguchi
Jiro Koga
Shigehisa Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP55138906A priority Critical patent/JPS5763410A/en
Publication of JPS5763410A publication Critical patent/JPS5763410A/en
Publication of JPS6326426B2 publication Critical patent/JPS6326426B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To enable simplification of processing and to enable to perform a highspeed processing, by a method wherein an image sensor or a pattern is made to turn centering around a point in the pattern, and the normalized function of amplitude function of a tangent at each coordinate point on a profile is Fourie-transformed at high speed.
CONSTITUTION: Either a CCD image sensor of a linear array or a plane pattern is intermittently turned in one-way direction at a pitch angle of 2π/n to the other centering around a point O in a profile of a plane pattern and starting from one point on the frofile. A declination function of a tangent of each of n-pieces of coordinate point (ri, θi) on the profile from the tangent at the starting point is decided, and a normalized function ϕi*=ϕi-θi of the amplitude function is Fourie-transformed at high speed to decide the shape of the plane pattern from the factor. This eliminates the need for the rearrangement of a coordinate point and an interpolating processing for sampling which are required in the case of the conventional X Y soanning, and permits the simplification and acceleration of the processing speeed.
COPYRIGHT: (C)1982,JPO&Japio
JP55138906A 1980-10-03 1980-10-03 Measuring method and device for shape of plane pattern Granted JPS5763410A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55138906A JPS5763410A (en) 1980-10-03 1980-10-03 Measuring method and device for shape of plane pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55138906A JPS5763410A (en) 1980-10-03 1980-10-03 Measuring method and device for shape of plane pattern

Publications (2)

Publication Number Publication Date
JPS5763410A true JPS5763410A (en) 1982-04-16
JPS6326426B2 JPS6326426B2 (en) 1988-05-30

Family

ID=15232891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55138906A Granted JPS5763410A (en) 1980-10-03 1980-10-03 Measuring method and device for shape of plane pattern

Country Status (1)

Country Link
JP (1) JPS5763410A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6429702A (en) * 1987-07-24 1989-01-31 Hamamatsu Photonics Kk Shape measuring instrument

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6354508U (en) * 1986-09-30 1988-04-12

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146840A (en) * 1974-10-18 1976-04-21 Shindengen Electric Mfg Mojininshikisochi
JPS5583978A (en) * 1978-12-20 1980-06-24 Matsushita Electric Ind Co Ltd Pattern recognizer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146840A (en) * 1974-10-18 1976-04-21 Shindengen Electric Mfg Mojininshikisochi
JPS5583978A (en) * 1978-12-20 1980-06-24 Matsushita Electric Ind Co Ltd Pattern recognizer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6429702A (en) * 1987-07-24 1989-01-31 Hamamatsu Photonics Kk Shape measuring instrument

Also Published As

Publication number Publication date
JPS6326426B2 (en) 1988-05-30

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