JPS5763107A - Method for preventing inclusion of air bubble in viscous liquid - Google Patents

Method for preventing inclusion of air bubble in viscous liquid

Info

Publication number
JPS5763107A
JPS5763107A JP13625680A JP13625680A JPS5763107A JP S5763107 A JPS5763107 A JP S5763107A JP 13625680 A JP13625680 A JP 13625680A JP 13625680 A JP13625680 A JP 13625680A JP S5763107 A JPS5763107 A JP S5763107A
Authority
JP
Japan
Prior art keywords
liquid
vessel
viscous liquid
photoresist
inclusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13625680A
Other languages
English (en)
Inventor
Kojirou Sugane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13625680A priority Critical patent/JPS5763107A/ja
Publication of JPS5763107A publication Critical patent/JPS5763107A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Degasification And Air Bubble Elimination (AREA)
JP13625680A 1980-09-30 1980-09-30 Method for preventing inclusion of air bubble in viscous liquid Pending JPS5763107A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13625680A JPS5763107A (en) 1980-09-30 1980-09-30 Method for preventing inclusion of air bubble in viscous liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13625680A JPS5763107A (en) 1980-09-30 1980-09-30 Method for preventing inclusion of air bubble in viscous liquid

Publications (1)

Publication Number Publication Date
JPS5763107A true JPS5763107A (en) 1982-04-16

Family

ID=15170925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13625680A Pending JPS5763107A (en) 1980-09-30 1980-09-30 Method for preventing inclusion of air bubble in viscous liquid

Country Status (1)

Country Link
JP (1) JPS5763107A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102736419A (zh) * 2011-04-13 2012-10-17 颀中科技（苏州）有限公司 光刻胶除泡装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102736419A (zh) * 2011-04-13 2012-10-17 颀中科技（苏州）有限公司 光刻胶除泡装置

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