JPS5759543B2 - - Google Patents

Info

Publication number
JPS5759543B2
JPS5759543B2 JP6165274A JP6165274A JPS5759543B2 JP S5759543 B2 JPS5759543 B2 JP S5759543B2 JP 6165274 A JP6165274 A JP 6165274A JP 6165274 A JP6165274 A JP 6165274A JP S5759543 B2 JPS5759543 B2 JP S5759543B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6165274A
Other languages
Japanese (ja)
Other versions
JPS50153871A (enrdf_load_stackoverflow
Inventor
Teruhiko Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6165274A priority Critical patent/JPS5759543B2/ja
Publication of JPS50153871A publication Critical patent/JPS50153871A/ja
Publication of JPS5759543B2 publication Critical patent/JPS5759543B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP6165274A 1974-05-30 1974-05-30 Expired JPS5759543B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6165274A JPS5759543B2 (enrdf_load_stackoverflow) 1974-05-30 1974-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6165274A JPS5759543B2 (enrdf_load_stackoverflow) 1974-05-30 1974-05-30

Publications (2)

Publication Number Publication Date
JPS50153871A JPS50153871A (enrdf_load_stackoverflow) 1975-12-11
JPS5759543B2 true JPS5759543B2 (enrdf_load_stackoverflow) 1982-12-15

Family

ID=13177359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6165274A Expired JPS5759543B2 (enrdf_load_stackoverflow) 1974-05-30 1974-05-30

Country Status (1)

Country Link
JP (1) JPS5759543B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6055827B2 (ja) * 1979-05-02 1985-12-06 日本真空技術株式会社 フオトマスク基板の加工法
JPS5646227A (en) * 1979-09-21 1981-04-27 Shin Etsu Chem Co Ltd Mask substrate for electronic device
JP2003114501A (ja) * 2001-10-04 2003-04-18 Konica Corp ハロゲン化銀写真乾板及びその製造方法

Also Published As

Publication number Publication date
JPS50153871A (enrdf_load_stackoverflow) 1975-12-11

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