JPS50153871A - - Google Patents

Info

Publication number
JPS50153871A
JPS50153871A JP6165274A JP6165274A JPS50153871A JP S50153871 A JPS50153871 A JP S50153871A JP 6165274 A JP6165274 A JP 6165274A JP 6165274 A JP6165274 A JP 6165274A JP S50153871 A JPS50153871 A JP S50153871A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6165274A
Other languages
Japanese (ja)
Other versions
JPS5759543B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6165274A priority Critical patent/JPS5759543B2/ja
Publication of JPS50153871A publication Critical patent/JPS50153871A/ja
Publication of JPS5759543B2 publication Critical patent/JPS5759543B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP6165274A 1974-05-30 1974-05-30 Expired JPS5759543B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6165274A JPS5759543B2 (enrdf_load_stackoverflow) 1974-05-30 1974-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6165274A JPS5759543B2 (enrdf_load_stackoverflow) 1974-05-30 1974-05-30

Publications (2)

Publication Number Publication Date
JPS50153871A true JPS50153871A (enrdf_load_stackoverflow) 1975-12-11
JPS5759543B2 JPS5759543B2 (enrdf_load_stackoverflow) 1982-12-15

Family

ID=13177359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6165274A Expired JPS5759543B2 (enrdf_load_stackoverflow) 1974-05-30 1974-05-30

Country Status (1)

Country Link
JP (1) JPS5759543B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146928A (en) * 1979-05-02 1980-11-15 Ulvac Corp Manufacturing of photomask substrate
JPS5646227A (en) * 1979-09-21 1981-04-27 Shin Etsu Chem Co Ltd Mask substrate for electronic device
JP2003114501A (ja) * 2001-10-04 2003-04-18 Konica Corp ハロゲン化銀写真乾板及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146928A (en) * 1979-05-02 1980-11-15 Ulvac Corp Manufacturing of photomask substrate
JPS5646227A (en) * 1979-09-21 1981-04-27 Shin Etsu Chem Co Ltd Mask substrate for electronic device
JP2003114501A (ja) * 2001-10-04 2003-04-18 Konica Corp ハロゲン化銀写真乾板及びその製造方法

Also Published As

Publication number Publication date
JPS5759543B2 (enrdf_load_stackoverflow) 1982-12-15

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