JPS5757204A - Method of measuring thickness of film formed on surface of ferromagnetic substance - Google Patents

Method of measuring thickness of film formed on surface of ferromagnetic substance

Info

Publication number
JPS5757204A
JPS5757204A JP13170080A JP13170080A JPS5757204A JP S5757204 A JPS5757204 A JP S5757204A JP 13170080 A JP13170080 A JP 13170080A JP 13170080 A JP13170080 A JP 13170080A JP S5757204 A JPS5757204 A JP S5757204A
Authority
JP
Japan
Prior art keywords
magnet
magnetic
poles
magnetic sensor
ferromagnetic substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13170080A
Other languages
Japanese (ja)
Inventor
Keigo Sasabayashi
Atsuhiko Matsuda
Nobuyuki Yamaji
Junichi Ujigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Koji KK
Original Assignee
Showa Koji KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Koji KK filed Critical Showa Koji KK
Priority to JP13170080A priority Critical patent/JPS5757204A/en
Publication of JPS5757204A publication Critical patent/JPS5757204A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE:To accurately measure the thickness of a nonmagnetic film formed on the surface of a ferromagnetic substance, by a probe wherein both magntic poles of a magnet are disposed to face the same plane at two different points and a magnetic sensor is attached to either one of the magnetic poles. CONSTITUTION:Two magnetic poles of a magnet are disposed to face the same plane at two different points and a magnetic sensor is bonded to either one of the magnetic poles of such magnet to form the film thickness detecting end, so that a film thickness detecting probe is constituted. Output from the magnetic sensor which generates when the probe is abutted with the measured material is detected to measure the density of magnetic flux, thereby to gauge a thickness of a nonmagnetic film formed on the surface of a ferromagnetic substance. For example, intermediates 5, 5' extending from both poles of a magnet 3 are abutted via a spacer 6 with the surface of a ferromagnetic substance 1 having a nonmagnetic film 2 thereon. A magnetic sensor 4 formed of indium antimony or others is attached to the intermediate 5 having a smaller area. Output from the magnetic sensor 4 is compared with output from a compensating sensor 4' to obtain a film thickness of the nonmagnetic substance 2.
JP13170080A 1980-09-24 1980-09-24 Method of measuring thickness of film formed on surface of ferromagnetic substance Pending JPS5757204A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13170080A JPS5757204A (en) 1980-09-24 1980-09-24 Method of measuring thickness of film formed on surface of ferromagnetic substance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13170080A JPS5757204A (en) 1980-09-24 1980-09-24 Method of measuring thickness of film formed on surface of ferromagnetic substance

Publications (1)

Publication Number Publication Date
JPS5757204A true JPS5757204A (en) 1982-04-06

Family

ID=15064151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13170080A Pending JPS5757204A (en) 1980-09-24 1980-09-24 Method of measuring thickness of film formed on surface of ferromagnetic substance

Country Status (1)

Country Link
JP (1) JPS5757204A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192411A (en) * 1983-04-11 1984-10-31 Fuji Heavy Ind Ltd Machining device for blind groove
US4767732A (en) * 1986-08-28 1988-08-30 Kabushiki Kaisha Toshiba High dielectric constant ceramic material and method of manufacturing the same
JPH06501653A (en) * 1990-11-23 1994-02-24 エイ　イー　ビショップ　アンド　アソシエイツ　プロプライエタリー　リミテッド Improvement of slot cutting machine
JPH06317401A (en) * 1992-10-05 1994-11-15 De Felsko Corp Combined coating thickness gauge for non-ferrous coatings on iron substrates and non-conductive coatings on conductive substrates
JP2016050105A (en) * 2014-09-02 2016-04-11 東芝エレベータ株式会社 Safety device of passenger conveyor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179269A (en) * 1974-12-29 1976-07-10 Takamatsu Electric Works Ltd Kichukaiheikino shokosochi
JPS52100183A (en) * 1976-02-18 1977-08-22 Takamatsu Electric Works Ltd Method and device for deenergizing switch

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179269A (en) * 1974-12-29 1976-07-10 Takamatsu Electric Works Ltd Kichukaiheikino shokosochi
JPS52100183A (en) * 1976-02-18 1977-08-22 Takamatsu Electric Works Ltd Method and device for deenergizing switch

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192411A (en) * 1983-04-11 1984-10-31 Fuji Heavy Ind Ltd Machining device for blind groove
US4767732A (en) * 1986-08-28 1988-08-30 Kabushiki Kaisha Toshiba High dielectric constant ceramic material and method of manufacturing the same
JPH06501653A (en) * 1990-11-23 1994-02-24 エイ　イー　ビショップ　アンド　アソシエイツ　プロプライエタリー　リミテッド Improvement of slot cutting machine
JPH06317401A (en) * 1992-10-05 1994-11-15 De Felsko Corp Combined coating thickness gauge for non-ferrous coatings on iron substrates and non-conductive coatings on conductive substrates
USRE35703E (en) * 1992-10-05 1997-12-30 Defelsko Corporation Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil
JP2016050105A (en) * 2014-09-02 2016-04-11 東芝エレベータ株式会社 Safety device of passenger conveyor

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