JPS5756738A - Defect detector for flat material - Google Patents

Defect detector for flat material

Info

Publication number
JPS5756738A
JPS5756738A JP13385480A JP13385480A JPS5756738A JP S5756738 A JPS5756738 A JP S5756738A JP 13385480 A JP13385480 A JP 13385480A JP 13385480 A JP13385480 A JP 13385480A JP S5756738 A JPS5756738 A JP S5756738A
Authority
JP
Japan
Prior art keywords
wavelength
spot
projecting
rectangular strip
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13385480A
Other languages
Japanese (ja)
Inventor
Yutaka Abe
Toshinori Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP13385480A priority Critical patent/JPS5756738A/en
Publication of JPS5756738A publication Critical patent/JPS5756738A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To improve the accuracy of defect detection by synthesizing the beam of the 1st wavelength and the beam of the 2nd wavelength in such a way that the rectangular strip-like spot projecting the beam of the 1st wavelength and the 2nd rectangular strip-like spot projecting the beam of the 2nd wavelength intersect orthognally with each other. CONSTITUTION:The defect detector for flat materials is designed to project the laser beam 1'' of the 1st wavelength (a) and the laser beam 1''' of the 2nd wavelength in such a way that the 1st rectangular strip-like spot 1'a projecting the laser beam 1'' of the 1st wavelength (a) and the 2nd rectangular strip-like spot 1'b projecting the laser beam 1''' of the 2nd wavelength (b) intersect orghogonally with each other. The laser beams 1'', 1''' of the 1st wavelength (a) and the 2nd wavelength (b) are detected respectively by separate photodetectors 6'a, 6'b. In this case, the detected results of the two photodetectors 6'a, 6'b are both employed, whereby the defect detection is executed with good accuracy for a flat material in which arraying directions of defects appear randomly.
JP13385480A 1980-09-22 1980-09-22 Defect detector for flat material Pending JPS5756738A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13385480A JPS5756738A (en) 1980-09-22 1980-09-22 Defect detector for flat material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13385480A JPS5756738A (en) 1980-09-22 1980-09-22 Defect detector for flat material

Publications (1)

Publication Number Publication Date
JPS5756738A true JPS5756738A (en) 1982-04-05

Family

ID=15114580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13385480A Pending JPS5756738A (en) 1980-09-22 1980-09-22 Defect detector for flat material

Country Status (1)

Country Link
JP (1) JPS5756738A (en)

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