JPS5750282B2 - - Google Patents

Info

Publication number
JPS5750282B2
JPS5750282B2 JP51139915A JP13991576A JPS5750282B2 JP S5750282 B2 JPS5750282 B2 JP S5750282B2 JP 51139915 A JP51139915 A JP 51139915A JP 13991576 A JP13991576 A JP 13991576A JP S5750282 B2 JPS5750282 B2 JP S5750282B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51139915A
Other languages
Japanese (ja)
Other versions
JPS5364478A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13991576A priority Critical patent/JPS5364478A/ja
Publication of JPS5364478A publication Critical patent/JPS5364478A/ja
Publication of JPS5750282B2 publication Critical patent/JPS5750282B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP13991576A 1976-11-20 1976-11-20 Position aligning device Granted JPS5364478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13991576A JPS5364478A (en) 1976-11-20 1976-11-20 Position aligning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13991576A JPS5364478A (en) 1976-11-20 1976-11-20 Position aligning device

Publications (2)

Publication Number Publication Date
JPS5364478A JPS5364478A (en) 1978-06-08
JPS5750282B2 true JPS5750282B2 (OSRAM) 1982-10-26

Family

ID=15256599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13991576A Granted JPS5364478A (en) 1976-11-20 1976-11-20 Position aligning device

Country Status (1)

Country Link
JP (1) JPS5364478A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014053343A (ja) * 2012-09-05 2014-03-20 Toyota Motor Corp 半導体位置決め装置、及び半導体位置決め方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121640A (en) * 1979-03-13 1980-09-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask alignment method
JPS5830129A (ja) * 1981-08-17 1983-02-22 Hitachi Ltd 精密平面移動装置
CN109079539A (zh) * 2018-07-17 2018-12-25 安徽致精机电科技有限公司 一种用于机电设备加工的辅助夹持装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014053343A (ja) * 2012-09-05 2014-03-20 Toyota Motor Corp 半導体位置決め装置、及び半導体位置決め方法

Also Published As

Publication number Publication date
JPS5364478A (en) 1978-06-08

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