JPS5748613A - Flow rate display unit of flow rate control device - Google Patents
Flow rate display unit of flow rate control deviceInfo
- Publication number
- JPS5748613A JPS5748613A JP12440480A JP12440480A JPS5748613A JP S5748613 A JPS5748613 A JP S5748613A JP 12440480 A JP12440480 A JP 12440480A JP 12440480 A JP12440480 A JP 12440480A JP S5748613 A JPS5748613 A JP S5748613A
- Authority
- JP
- Japan
- Prior art keywords
- fluids
- flow rate
- flowmeter
- rate control
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 abstract 9
- 230000001276 controlling effect Effects 0.000 abstract 1
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/06—Indicating or recording devices
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Details Of Flowmeters (AREA)
- Control Of Non-Electrical Variables (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12440480A JPS5748613A (en) | 1980-09-08 | 1980-09-08 | Flow rate display unit of flow rate control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12440480A JPS5748613A (en) | 1980-09-08 | 1980-09-08 | Flow rate display unit of flow rate control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5748613A true JPS5748613A (en) | 1982-03-20 |
| JPS6152709B2 JPS6152709B2 (enExample) | 1986-11-14 |
Family
ID=14884606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12440480A Granted JPS5748613A (en) | 1980-09-08 | 1980-09-08 | Flow rate display unit of flow rate control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5748613A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013059383A (ja) * | 2011-09-12 | 2013-04-04 | Metoran:Kk | 気体供給ユニットおよび気体混合装置 |
| JP2013059384A (ja) * | 2011-09-12 | 2013-04-04 | Metoran:Kk | 気体混合装置およびシステム |
-
1980
- 1980-09-08 JP JP12440480A patent/JPS5748613A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013059383A (ja) * | 2011-09-12 | 2013-04-04 | Metoran:Kk | 気体供給ユニットおよび気体混合装置 |
| JP2013059384A (ja) * | 2011-09-12 | 2013-04-04 | Metoran:Kk | 気体混合装置およびシステム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6152709B2 (enExample) | 1986-11-14 |
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