JPS57484A - Atmospheric gas introducing apparatus - Google Patents

Atmospheric gas introducing apparatus

Info

Publication number
JPS57484A
JPS57484A JP1390780A JP1390780A JPS57484A JP S57484 A JPS57484 A JP S57484A JP 1390780 A JP1390780 A JP 1390780A JP 1390780 A JP1390780 A JP 1390780A JP S57484 A JPS57484 A JP S57484A
Authority
JP
Japan
Prior art keywords
atmospheric gas
gas introducing
introducing apparatus
atmospheric
introducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1390780A
Other languages
Japanese (ja)
Other versions
JPS5758593B2 (en
Inventor
Hidenobu Abe
Yasuo Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Origin Electric Co Ltd
Original Assignee
Origin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Origin Electric Co Ltd filed Critical Origin Electric Co Ltd
Priority to JP1390780A priority Critical patent/JPS57484A/en
Publication of JPS57484A publication Critical patent/JPS57484A/en
Publication of JPS5758593B2 publication Critical patent/JPS5758593B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP1390780A 1980-02-07 1980-02-07 Atmospheric gas introducing apparatus Granted JPS57484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1390780A JPS57484A (en) 1980-02-07 1980-02-07 Atmospheric gas introducing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1390780A JPS57484A (en) 1980-02-07 1980-02-07 Atmospheric gas introducing apparatus

Publications (2)

Publication Number Publication Date
JPS57484A true JPS57484A (en) 1982-01-05
JPS5758593B2 JPS5758593B2 (en) 1982-12-10

Family

ID=11846237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1390780A Granted JPS57484A (en) 1980-02-07 1980-02-07 Atmospheric gas introducing apparatus

Country Status (1)

Country Link
JP (1) JPS57484A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61141123A (en) * 1984-12-14 1986-06-28 Seiko Epson Corp Equipment for manufacturing semiconductor
JPS61269307A (en) * 1985-05-24 1986-11-28 Hitachi Ltd Cvd device
JPH03212933A (en) * 1990-01-18 1991-09-18 Tokyo Electron Ltd Heat treatment method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61141123A (en) * 1984-12-14 1986-06-28 Seiko Epson Corp Equipment for manufacturing semiconductor
JPS61269307A (en) * 1985-05-24 1986-11-28 Hitachi Ltd Cvd device
JPH03212933A (en) * 1990-01-18 1991-09-18 Tokyo Electron Ltd Heat treatment method

Also Published As

Publication number Publication date
JPS5758593B2 (en) 1982-12-10

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