JPS57484A - Atmospheric gas introducing apparatus - Google Patents
Atmospheric gas introducing apparatusInfo
- Publication number
- JPS57484A JPS57484A JP1390780A JP1390780A JPS57484A JP S57484 A JPS57484 A JP S57484A JP 1390780 A JP1390780 A JP 1390780A JP 1390780 A JP1390780 A JP 1390780A JP S57484 A JPS57484 A JP S57484A
- Authority
- JP
- Japan
- Prior art keywords
- atmospheric gas
- gas introducing
- introducing apparatus
- atmospheric
- introducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1390780A JPS57484A (en) | 1980-02-07 | 1980-02-07 | Atmospheric gas introducing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1390780A JPS57484A (en) | 1980-02-07 | 1980-02-07 | Atmospheric gas introducing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57484A true JPS57484A (en) | 1982-01-05 |
JPS5758593B2 JPS5758593B2 (en) | 1982-12-10 |
Family
ID=11846237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1390780A Granted JPS57484A (en) | 1980-02-07 | 1980-02-07 | Atmospheric gas introducing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57484A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61141123A (en) * | 1984-12-14 | 1986-06-28 | Seiko Epson Corp | Equipment for manufacturing semiconductor |
JPS61269307A (en) * | 1985-05-24 | 1986-11-28 | Hitachi Ltd | Cvd device |
JPH03212933A (en) * | 1990-01-18 | 1991-09-18 | Tokyo Electron Ltd | Heat treatment method |
-
1980
- 1980-02-07 JP JP1390780A patent/JPS57484A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61141123A (en) * | 1984-12-14 | 1986-06-28 | Seiko Epson Corp | Equipment for manufacturing semiconductor |
JPS61269307A (en) * | 1985-05-24 | 1986-11-28 | Hitachi Ltd | Cvd device |
JPH03212933A (en) * | 1990-01-18 | 1991-09-18 | Tokyo Electron Ltd | Heat treatment method |
Also Published As
Publication number | Publication date |
---|---|
JPS5758593B2 (en) | 1982-12-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2073927B (en) | Keyboard apparatus | |
GB2018596B (en) | Gas analysis apparatus | |
DE3063342D1 (en) | Gas analysis apparatus | |
ZA815638B (en) | Gas analyzer | |
ZA829345B (en) | Gas separation apparatus | |
JPS54147175A (en) | Gas separation method and apparatus | |
DE3365226D1 (en) | Gas chromatographic apparatus | |
ZA815676B (en) | Process for generating gas | |
GB2086554B (en) | Cryogenic apparatus | |
GB2070239B (en) | Gas analyzing apparatus | |
DE3176166D1 (en) | Keyboard apparatus | |
DE3170311D1 (en) | Gas insulated electrical apparatus | |
DE3271778D1 (en) | Gas laser apparatus | |
GB2126412B (en) | Gas laser apparatus | |
DE3070326D1 (en) | Gas sampling system | |
GB2076676B (en) | Gas mixing apparatus | |
JPS54151553A (en) | Method and apparatus for ionizing gas | |
JPS5791327A (en) | Gas turbine apparatus | |
GB2127537B (en) | Gas detection apparatus | |
ZW18580A1 (en) | Producer gas apparatus | |
JPS57484A (en) | Atmospheric gas introducing apparatus | |
JPS5788222A (en) | Gas turbine apparatus | |
GB2076023B (en) | Gas carburising | |
DE3169189D1 (en) | Gas insulated electrical apparatus | |
GB2038187B (en) | Gas recovery apparatus for diving |