JPS57461B2 - - Google Patents

Info

Publication number
JPS57461B2
JPS57461B2 JP14100876A JP14100876A JPS57461B2 JP S57461 B2 JPS57461 B2 JP S57461B2 JP 14100876 A JP14100876 A JP 14100876A JP 14100876 A JP14100876 A JP 14100876A JP S57461 B2 JPS57461 B2 JP S57461B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14100876A
Other languages
Japanese (ja)
Other versions
JPS5365777A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14100876A priority Critical patent/JPS5365777A/ja
Publication of JPS5365777A publication Critical patent/JPS5365777A/ja
Publication of JPS57461B2 publication Critical patent/JPS57461B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP14100876A 1976-11-24 1976-11-24 Surface defect detector Granted JPS5365777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14100876A JPS5365777A (en) 1976-11-24 1976-11-24 Surface defect detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14100876A JPS5365777A (en) 1976-11-24 1976-11-24 Surface defect detector

Publications (2)

Publication Number Publication Date
JPS5365777A JPS5365777A (en) 1978-06-12
JPS57461B2 true JPS57461B2 (cs) 1982-01-06

Family

ID=15282031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14100876A Granted JPS5365777A (en) 1976-11-24 1976-11-24 Surface defect detector

Country Status (1)

Country Link
JP (1) JPS5365777A (cs)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619442A (en) * 1979-07-26 1981-02-24 Hitachi Electronics Eng Co Ltd Optical surface defect detector
US4402607A (en) * 1980-05-16 1983-09-06 Gca Corporation Automatic detector for microscopic dust on large-area, optically unpolished surfaces
JPS57161641A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPS60147945A (ja) * 1984-01-10 1985-08-05 Victor Co Of Japan Ltd 光デイスク検査装置
JPS61105447A (ja) * 1985-10-23 1986-05-23 Hitachi Ltd 面板欠陥検査用集光器
JPS63241343A (ja) * 1988-02-24 1988-10-06 Nikon Corp 欠陥検査装置
JPH0492239A (ja) * 1990-08-06 1992-03-25 Excel:Kk ビデオカセット等のテープの傷検知方法並びにそれに用いる装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010188A (cs) * 1973-05-25 1975-02-01

Also Published As

Publication number Publication date
JPS5365777A (en) 1978-06-12

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