JPS5745233A - Cleaning and drying device for spinner - Google Patents
Cleaning and drying device for spinnerInfo
- Publication number
- JPS5745233A JPS5745233A JP12020680A JP12020680A JPS5745233A JP S5745233 A JPS5745233 A JP S5745233A JP 12020680 A JP12020680 A JP 12020680A JP 12020680 A JP12020680 A JP 12020680A JP S5745233 A JPS5745233 A JP S5745233A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- swirl
- retaining stand
- making chamber
- stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Photographic Processing Devices Using Wet Methods (AREA)
- Jigs For Machine Tools (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12020680A JPS5745233A (en) | 1980-08-30 | 1980-08-30 | Cleaning and drying device for spinner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12020680A JPS5745233A (en) | 1980-08-30 | 1980-08-30 | Cleaning and drying device for spinner |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5745233A true JPS5745233A (en) | 1982-03-15 |
JPS623974B2 JPS623974B2 (ja) | 1987-01-28 |
Family
ID=14780522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12020680A Granted JPS5745233A (en) | 1980-08-30 | 1980-08-30 | Cleaning and drying device for spinner |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5745233A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62247531A (ja) * | 1986-04-18 | 1987-10-28 | Fujitsu Ltd | 洗浄方法 |
US5375291A (en) * | 1992-05-18 | 1994-12-27 | Tokyo Electron Limited | Device having brush for scrubbing substrate |
KR100382343B1 (ko) * | 2001-03-06 | 2003-05-09 | 엘지전자 주식회사 | 스핀 드라이어 |
-
1980
- 1980-08-30 JP JP12020680A patent/JPS5745233A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62247531A (ja) * | 1986-04-18 | 1987-10-28 | Fujitsu Ltd | 洗浄方法 |
US5375291A (en) * | 1992-05-18 | 1994-12-27 | Tokyo Electron Limited | Device having brush for scrubbing substrate |
KR100382343B1 (ko) * | 2001-03-06 | 2003-05-09 | 엘지전자 주식회사 | 스핀 드라이어 |
Also Published As
Publication number | Publication date |
---|---|
JPS623974B2 (ja) | 1987-01-28 |
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