JPS5742539A - Distillation device suitable for separating specially zrc 4 from hfc 4 - Google Patents

Distillation device suitable for separating specially zrc 4 from hfc 4

Info

Publication number
JPS5742539A
JPS5742539A JP10529980A JP10529980A JPS5742539A JP S5742539 A JPS5742539 A JP S5742539A JP 10529980 A JP10529980 A JP 10529980A JP 10529980 A JP10529980 A JP 10529980A JP S5742539 A JPS5742539 A JP S5742539A
Authority
JP
Japan
Prior art keywords
still
pipe
column
hfcl
exhausted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10529980A
Other languages
Japanese (ja)
Other versions
JPS605530B2 (en
Inventor
Hiroshi Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP10529980A priority Critical patent/JPS605530B2/en
Priority to CA000381713A priority patent/CA1171664A/en
Priority to IL6332581A priority patent/IL63325A/en
Priority to EP81401226A priority patent/EP0045270A1/en
Priority to BR8104889A priority patent/BR8104889A/en
Publication of JPS5742539A publication Critical patent/JPS5742539A/en
Publication of JPS605530B2 publication Critical patent/JPS605530B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

PURPOSE: An industrial distillation device capable of being operated safely for a sufficiently long time, consisting of a still equipped with pipes for feeding a raw material and taking out a product, a cooling means with its temperature controllable connected to the top of the still, a pressure-resistant structure of a column body epuipped with a pipe for taking out a product at its top, and a heating furnace.
CONSTITUTION: The spherical still 2 in the insulating part 6 of an insulating material is connected to the approximately vertical cylindrical cooling column 3 having a smaller cross-sectional diameter than that of the still at the top of the still. On the outer periphery of the column 3, the cooler 4 or a cooling jacket for letting a refrigerant gas flow is set. When the whole length of the column is limited, the spiral plate 5 may be arranged to lengthen the disrtillation travel. A raw chloride of a raw material is fed from the pipe P1 to the still 2, the still 2 is closed hermetically, and distillation is carried out at ≥25atm. at ≥about 450°C by heating the still by the heater 1. Vapor having concentrated HfCl4 is exhausted from the pipe P3 and ZrCl4 with a smaller amount of HfCl4 than a given amount is exhausted from the pipe P2. Although some unsatisfactory points may be left in hot strength with respect to corrosion resistance, cracking between granules, cost, etc., a carbon steel (SS material) is used as the material of the device.
COPYRIGHT: (C)1982,JPO&Japio
JP10529980A 1980-07-30 1980-07-30 Distillation equipment especially suitable for separating ZrCI↓4 and HfCI↓4 Expired JPS605530B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP10529980A JPS605530B2 (en) 1980-07-30 1980-07-30 Distillation equipment especially suitable for separating ZrCI↓4 and HfCI↓4
CA000381713A CA1171664A (en) 1980-07-30 1981-07-14 Process for separation of zirconium- and hafnium tetrachlorides from a mixture comprising such chlorides and apparatus therefor
IL6332581A IL63325A (en) 1980-07-30 1981-07-15 Process and apparatus for separation of zirconium-and hafnium tetrachlorides from a mixture comprising such chlorides
EP81401226A EP0045270A1 (en) 1980-07-30 1981-07-29 Process for separation of zirconium- and hafnium tetrachlorides from a mixture comprising such chlorides and apparatus therefor
BR8104889A BR8104889A (en) 1980-07-30 1981-07-29 PROCESS FOR SEPARATION OF ZIRCONIUM AND HAFNIUM TETRACLORIDE FROM A MIXTURE THAT UNDERSTANDS THESE CHLORIDES AND APPARATUS FOR SUCH

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10529980A JPS605530B2 (en) 1980-07-30 1980-07-30 Distillation equipment especially suitable for separating ZrCI↓4 and HfCI↓4

Publications (2)

Publication Number Publication Date
JPS5742539A true JPS5742539A (en) 1982-03-10
JPS605530B2 JPS605530B2 (en) 1985-02-12

Family

ID=14403806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10529980A Expired JPS605530B2 (en) 1980-07-30 1980-07-30 Distillation equipment especially suitable for separating ZrCI↓4 and HfCI↓4

Country Status (1)

Country Link
JP (1) JPS605530B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2876369A1 (en) * 2004-10-11 2006-04-14 Cie Europ Du Zirconium Cezus S PROCESS FOR SEPARATING ZIRCONIUM AND HAFNIUM

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7681581B2 (en) 2005-04-01 2010-03-23 Fsi International, Inc. Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids
CN102569137B (en) 2006-07-07 2015-05-06 Telfsi股份有限公司 Tool and method for treating microelectronic workpieces
KR101690047B1 (en) 2008-05-09 2016-12-27 티이엘 에프에스아이, 인코포레이티드 Tools and methods for processing microelectronic workpices using process chamber designs that easily transition between open and closed modes of operation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2876369A1 (en) * 2004-10-11 2006-04-14 Cie Europ Du Zirconium Cezus S PROCESS FOR SEPARATING ZIRCONIUM AND HAFNIUM
WO2006040458A2 (en) * 2004-10-11 2006-04-20 Compagnie Europeenne Du Zirconium-Cezus Method for separating zirconium and hafnium
WO2006040458A3 (en) * 2004-10-11 2007-04-05 Cezus Co Europ Zirconium Method for separating zirconium and hafnium
EA010421B1 (en) * 2004-10-11 2008-08-29 Компани Еропеен Дю Зиркониум - Сезюс A method for separating zirconium and hafnium

Also Published As

Publication number Publication date
JPS605530B2 (en) 1985-02-12

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