JPS5742539A - Distillation device suitable for separating specially zrc 4 from hfc 4 - Google Patents
Distillation device suitable for separating specially zrc 4 from hfc 4Info
- Publication number
- JPS5742539A JPS5742539A JP10529980A JP10529980A JPS5742539A JP S5742539 A JPS5742539 A JP S5742539A JP 10529980 A JP10529980 A JP 10529980A JP 10529980 A JP10529980 A JP 10529980A JP S5742539 A JPS5742539 A JP S5742539A
- Authority
- JP
- Japan
- Prior art keywords
- still
- pipe
- column
- hfcl
- exhausted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
PURPOSE: An industrial distillation device capable of being operated safely for a sufficiently long time, consisting of a still equipped with pipes for feeding a raw material and taking out a product, a cooling means with its temperature controllable connected to the top of the still, a pressure-resistant structure of a column body epuipped with a pipe for taking out a product at its top, and a heating furnace.
CONSTITUTION: The spherical still 2 in the insulating part 6 of an insulating material is connected to the approximately vertical cylindrical cooling column 3 having a smaller cross-sectional diameter than that of the still at the top of the still. On the outer periphery of the column 3, the cooler 4 or a cooling jacket for letting a refrigerant gas flow is set. When the whole length of the column is limited, the spiral plate 5 may be arranged to lengthen the disrtillation travel. A raw chloride of a raw material is fed from the pipe P1 to the still 2, the still 2 is closed hermetically, and distillation is carried out at ≥25atm. at ≥about 450°C by heating the still by the heater 1. Vapor having concentrated HfCl4 is exhausted from the pipe P3 and ZrCl4 with a smaller amount of HfCl4 than a given amount is exhausted from the pipe P2. Although some unsatisfactory points may be left in hot strength with respect to corrosion resistance, cracking between granules, cost, etc., a carbon steel (SS material) is used as the material of the device.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10529980A JPS605530B2 (en) | 1980-07-30 | 1980-07-30 | Distillation equipment especially suitable for separating ZrCI↓4 and HfCI↓4 |
CA000381713A CA1171664A (en) | 1980-07-30 | 1981-07-14 | Process for separation of zirconium- and hafnium tetrachlorides from a mixture comprising such chlorides and apparatus therefor |
IL6332581A IL63325A (en) | 1980-07-30 | 1981-07-15 | Process and apparatus for separation of zirconium-and hafnium tetrachlorides from a mixture comprising such chlorides |
EP81401226A EP0045270A1 (en) | 1980-07-30 | 1981-07-29 | Process for separation of zirconium- and hafnium tetrachlorides from a mixture comprising such chlorides and apparatus therefor |
BR8104889A BR8104889A (en) | 1980-07-30 | 1981-07-29 | PROCESS FOR SEPARATION OF ZIRCONIUM AND HAFNIUM TETRACLORIDE FROM A MIXTURE THAT UNDERSTANDS THESE CHLORIDES AND APPARATUS FOR SUCH |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10529980A JPS605530B2 (en) | 1980-07-30 | 1980-07-30 | Distillation equipment especially suitable for separating ZrCI↓4 and HfCI↓4 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5742539A true JPS5742539A (en) | 1982-03-10 |
JPS605530B2 JPS605530B2 (en) | 1985-02-12 |
Family
ID=14403806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10529980A Expired JPS605530B2 (en) | 1980-07-30 | 1980-07-30 | Distillation equipment especially suitable for separating ZrCI↓4 and HfCI↓4 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS605530B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2876369A1 (en) * | 2004-10-11 | 2006-04-14 | Cie Europ Du Zirconium Cezus S | PROCESS FOR SEPARATING ZIRCONIUM AND HAFNIUM |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7681581B2 (en) | 2005-04-01 | 2010-03-23 | Fsi International, Inc. | Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids |
CN102569137B (en) | 2006-07-07 | 2015-05-06 | Telfsi股份有限公司 | Tool and method for treating microelectronic workpieces |
KR101690047B1 (en) | 2008-05-09 | 2016-12-27 | 티이엘 에프에스아이, 인코포레이티드 | Tools and methods for processing microelectronic workpices using process chamber designs that easily transition between open and closed modes of operation |
-
1980
- 1980-07-30 JP JP10529980A patent/JPS605530B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2876369A1 (en) * | 2004-10-11 | 2006-04-14 | Cie Europ Du Zirconium Cezus S | PROCESS FOR SEPARATING ZIRCONIUM AND HAFNIUM |
WO2006040458A2 (en) * | 2004-10-11 | 2006-04-20 | Compagnie Europeenne Du Zirconium-Cezus | Method for separating zirconium and hafnium |
WO2006040458A3 (en) * | 2004-10-11 | 2007-04-05 | Cezus Co Europ Zirconium | Method for separating zirconium and hafnium |
EA010421B1 (en) * | 2004-10-11 | 2008-08-29 | Компани Еропеен Дю Зиркониум - Сезюс | A method for separating zirconium and hafnium |
Also Published As
Publication number | Publication date |
---|---|
JPS605530B2 (en) | 1985-02-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5638419A (en) | Metal heating furnace with protective atmosphere | |
EP0775100A1 (en) | Process for the production of fluorine containing olefins | |
JPS5317509A (en) | Method and apparatus for induction heating of metallic material | |
US3149176A (en) | Hydrodealkylation process | |
US2543005A (en) | Method for conducting hightemperature conversions | |
JPS5742539A (en) | Distillation device suitable for separating specially zrc 4 from hfc 4 | |
US2944878A (en) | Process for the separation of substances by vaporization | |
US2768070A (en) | Means for preparing aluminum chloride | |
US2723659A (en) | Submersible burner | |
GB1593473A (en) | Process and apparatus for heating gases or vapours | |
US2897064A (en) | Catalytic ovens | |
US2330057A (en) | Purification of liquids by distillation | |
JPS57140226A (en) | Fuel tank for automobile | |
JPS579847A (en) | Manufacturing apparatus for metallic titanium | |
Yoshikawa et al. | Fabrication and Properties of Corrosion-Resistant TP 347 H Stainless Steel.(Retroactive Coverage) | |
JPS52144306A (en) | Water cooled skid for heating furnace | |
CN212404274U (en) | Sealing device for thermal field top cover of deposition furnace | |
KR950007638Y1 (en) | Activated carbon regenerating furnace | |
Song et al. | Calculation and analysis on cooling capacity of blast furnace stave | |
Heinanen | Effect of temperature on water treatment | |
SU1693116A1 (en) | Chemical-thermal treatment unit | |
Gubin | Determination of the Coefficient of Heat Transfer From Slag to Electrode Wire in Electroslag Welding Steels | |
JPH01121681A (en) | Vertical type cylindrical heat treating furnace | |
JPS5760189A (en) | Method of decoking double pipe type heat exchanger coupled with thermal cracking furnace | |
GB889279A (en) | Improvements in and relating to heat transfer operations and equipment for these purposes |