JPS5739052B2 - - Google Patents

Info

Publication number
JPS5739052B2
JPS5739052B2 JP13582174A JP13582174A JPS5739052B2 JP S5739052 B2 JPS5739052 B2 JP S5739052B2 JP 13582174 A JP13582174 A JP 13582174A JP 13582174 A JP13582174 A JP 13582174A JP S5739052 B2 JPS5739052 B2 JP S5739052B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13582174A
Other languages
Japanese (ja)
Other versions
JPS5161265A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13582174A priority Critical patent/JPS5161265A/ja
Publication of JPS5161265A publication Critical patent/JPS5161265A/ja
Publication of JPS5739052B2 publication Critical patent/JPS5739052B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP13582174A 1974-11-25 1974-11-25 335 zokukagobutsuhandotaisoshi Granted JPS5161265A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13582174A JPS5161265A (en) 1974-11-25 1974-11-25 335 zokukagobutsuhandotaisoshi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13582174A JPS5161265A (en) 1974-11-25 1974-11-25 335 zokukagobutsuhandotaisoshi

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP58028232A Division JPS58212139A (ja) 1983-02-22 1983-02-22 ３−５族化合物半導体素子

Publications (2)

Publication Number Publication Date
JPS5161265A JPS5161265A (en) 1976-05-27
JPS5739052B2 true JPS5739052B2 (enrdf_load_stackoverflow) 1982-08-19

Family

ID=15160578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13582174A Granted JPS5161265A (en) 1974-11-25 1974-11-25 335 zokukagobutsuhandotaisoshi

Country Status (1)

Country Link
JP (1) JPS5161265A (enrdf_load_stackoverflow)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5433667A (en) * 1977-08-22 1979-03-12 Nippon Telegr & Teleph Corp <Ntt> Forming method for semiconductor surface protection film
JPS5558576A (en) * 1978-10-26 1980-05-01 Nec Corp Mis structure semiconductor device
JPS5768073A (en) * 1980-10-14 1982-04-26 Nec Corp Field effect transistor
JPS58119671A (ja) * 1982-01-09 1983-07-16 Agency Of Ind Science & Technol 電界効果トランジスタ
JPS5939024A (ja) * 1982-08-27 1984-03-03 Fujitsu Ltd 半導体装置の製造方法
JPS6047424A (ja) * 1983-08-25 1985-03-14 Koujiyundo Kagaku Kenkyusho:Kk 砒化ガリウムと砒化ホウ素との積層体及びその製法
JPS61140175A (ja) * 1984-12-13 1986-06-27 Semiconductor Energy Lab Co Ltd 被膜作製方法
JPS6120390A (ja) * 1984-07-09 1986-01-29 Agency Of Ind Science & Technol 半導体レ−ザ素子とその製造方法
JPS61140176A (ja) * 1984-12-13 1986-06-27 Semiconductor Energy Lab Co Ltd 半導体装置
JPH0740605B2 (ja) * 1985-12-16 1995-05-01 松下電器産業株式会社 半導体装置の製造方法
JP2659181B2 (ja) * 1986-05-08 1997-09-30 日本電気株式会社 半導体装置
JPH069198B2 (ja) * 1990-03-29 1994-02-02 株式会社半導体エネルギー研究所 半導体装置
JP2517863B2 (ja) * 1992-02-10 1996-07-24 工業技術院長 半導体装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5148958B2 (enrdf_load_stackoverflow) * 1973-01-10 1976-12-23

Also Published As

Publication number Publication date
JPS5161265A (en) 1976-05-27

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