JPS573710A - Amophous silicon and its production - Google Patents

Amophous silicon and its production

Info

Publication number
JPS573710A
JPS573710A JP7742480A JP7742480A JPS573710A JP S573710 A JPS573710 A JP S573710A JP 7742480 A JP7742480 A JP 7742480A JP 7742480 A JP7742480 A JP 7742480A JP S573710 A JPS573710 A JP S573710A
Authority
JP
Japan
Prior art keywords
silane
reaction
amorphous silicon
decomposition
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7742480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138126B2 (https=
Inventor
Fukuhiko Suga
Noribumi Kikuchi
Shinichiro Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP7742480A priority Critical patent/JPS573710A/ja
Publication of JPS573710A publication Critical patent/JPS573710A/ja
Publication of JPS6138126B2 publication Critical patent/JPS6138126B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Silicon Compounds (AREA)
JP7742480A 1980-06-09 1980-06-09 Amophous silicon and its production Granted JPS573710A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7742480A JPS573710A (en) 1980-06-09 1980-06-09 Amophous silicon and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7742480A JPS573710A (en) 1980-06-09 1980-06-09 Amophous silicon and its production

Publications (2)

Publication Number Publication Date
JPS573710A true JPS573710A (en) 1982-01-09
JPS6138126B2 JPS6138126B2 (https=) 1986-08-27

Family

ID=13633584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7742480A Granted JPS573710A (en) 1980-06-09 1980-06-09 Amophous silicon and its production

Country Status (1)

Country Link
JP (1) JPS573710A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945918A (ja) * 1982-07-26 1984-03-15 ロ−ヌ−プ−ラン・スペシアリテ・シミ−ク 密度の高い粉末状純けい素及びその製造方法
JPS60221311A (ja) * 1984-04-18 1985-11-06 Mitsubishi Gas Chem Co Inc 非晶質複合粉末組成物
WO2008155438A1 (es) * 2007-06-18 2008-12-24 Consejo Superior De Investigaciones Cientificas Microesferas de silicio y esponjas fotonicas, procedimiento de produccion y sus aplicaciones en la fabricacion de dispositivos fotonicos.

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945918A (ja) * 1982-07-26 1984-03-15 ロ−ヌ−プ−ラン・スペシアリテ・シミ−ク 密度の高い粉末状純けい素及びその製造方法
JPS60221311A (ja) * 1984-04-18 1985-11-06 Mitsubishi Gas Chem Co Inc 非晶質複合粉末組成物
WO2008155438A1 (es) * 2007-06-18 2008-12-24 Consejo Superior De Investigaciones Cientificas Microesferas de silicio y esponjas fotonicas, procedimiento de produccion y sus aplicaciones en la fabricacion de dispositivos fotonicos.
ES2331824A1 (es) * 2007-06-18 2010-01-15 Consejo Superior De Investigaciones Cientificas Microesferas de silicio y esponjas fotonicas, procedimiento de produccion y sus aplicaciones en la fabricacion de dispositivos fotonicos.
ES2331824B1 (es) * 2007-06-18 2010-10-22 Consejo Superior De Investigaciones Cientificas (Csic) Microcabidades opticas y esponjas fotonicas, procedimiento de producc ion y sus aplicaciones en la fabricacion de dispositivos fotonicos.

Also Published As

Publication number Publication date
JPS6138126B2 (https=) 1986-08-27

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