JPS573412A - Surface wave filter - Google Patents

Surface wave filter

Info

Publication number
JPS573412A
JPS573412A JP7668180A JP7668180A JPS573412A JP S573412 A JPS573412 A JP S573412A JP 7668180 A JP7668180 A JP 7668180A JP 7668180 A JP7668180 A JP 7668180A JP S573412 A JPS573412 A JP S573412A
Authority
JP
Japan
Prior art keywords
substrate
perforated layer
wave filter
surface wave
bulk waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7668180A
Other languages
Japanese (ja)
Inventor
Shizuo Tokunaga
Takuji Yamada
Shigeyuki Kita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7668180A priority Critical patent/JPS573412A/en
Publication of JPS573412A publication Critical patent/JPS573412A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • H03H9/02866Means for compensation or elimination of undesirable effects of bulk wave excitation and reflections
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To reduce the effect of bulk waves, by forming a perforated layer at the back of a piezoelectric substrate. CONSTITUTION:A protective film is formed on the surface of a piezoelectric substrate 1 and the substrate 1 is put in a vessel 5 having an electrolyte consisting of HNO3, and a DC voltage is applied for a prescribed time through opposing arrangement of platinum electrodes 2. Thus, a perforated layer 4 is formed at the back of the substrate 1. Bulk waves are irregularly reflected with the perforated layer and attenuated and absorbed.
JP7668180A 1980-06-09 1980-06-09 Surface wave filter Pending JPS573412A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7668180A JPS573412A (en) 1980-06-09 1980-06-09 Surface wave filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7668180A JPS573412A (en) 1980-06-09 1980-06-09 Surface wave filter

Publications (1)

Publication Number Publication Date
JPS573412A true JPS573412A (en) 1982-01-08

Family

ID=13612166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7668180A Pending JPS573412A (en) 1980-06-09 1980-06-09 Surface wave filter

Country Status (1)

Country Link
JP (1) JPS573412A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0349311A (en) * 1989-07-17 1991-03-04 Murata Mfg Co Ltd Piezoelectric device
JPH0349313A (en) * 1989-07-17 1991-03-04 Murata Mfg Co Ltd Piezoelectric device
JPH0349312A (en) * 1989-07-17 1991-03-04 Murata Mfg Co Ltd Piezoelectric device
EP1885062A1 (en) * 2006-07-27 2008-02-06 Koike Co., Ltd. Piezo-electric substrate and manufacturing method of the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0349311A (en) * 1989-07-17 1991-03-04 Murata Mfg Co Ltd Piezoelectric device
JPH0349313A (en) * 1989-07-17 1991-03-04 Murata Mfg Co Ltd Piezoelectric device
JPH0349312A (en) * 1989-07-17 1991-03-04 Murata Mfg Co Ltd Piezoelectric device
EP1885062A1 (en) * 2006-07-27 2008-02-06 Koike Co., Ltd. Piezo-electric substrate and manufacturing method of the same
US7569976B2 (en) 2006-07-27 2009-08-04 Koike Co., Ltd. Piezo-electric substrate and manufacturing method of the same

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