JPS573214B2 - - Google Patents
Info
- Publication number
- JPS573214B2 JPS573214B2 JP10282676A JP10282676A JPS573214B2 JP S573214 B2 JPS573214 B2 JP S573214B2 JP 10282676 A JP10282676 A JP 10282676A JP 10282676 A JP10282676 A JP 10282676A JP S573214 B2 JPS573214 B2 JP S573214B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10282676A JPS5328378A (en) | 1976-08-27 | 1976-08-27 | Method of plasma etching |
| US05/924,066 US4233109A (en) | 1976-01-16 | 1978-07-12 | Dry etching method |
| US06/166,700 US4371412A (en) | 1976-01-16 | 1980-07-03 | Dry etching apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10282676A JPS5328378A (en) | 1976-08-27 | 1976-08-27 | Method of plasma etching |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5328378A JPS5328378A (en) | 1978-03-16 |
| JPS573214B2 true JPS573214B2 (enExample) | 1982-01-20 |
Family
ID=14337815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10282676A Granted JPS5328378A (en) | 1976-01-16 | 1976-08-27 | Method of plasma etching |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5328378A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55111134A (en) * | 1979-02-19 | 1980-08-27 | Mitsubishi Electric Corp | Method of gas plasma etching |
| JPS611023A (ja) * | 1984-06-13 | 1986-01-07 | Teru Saamuko Kk | バツチプラズマ装置 |
| JPS6147642A (ja) * | 1984-08-14 | 1986-03-08 | Teru Saamuko Kk | プラズマ発生装置 |
| JPS62279626A (ja) * | 1986-05-27 | 1987-12-04 | M Setetsuku Kk | 半導体用基板に対する不純物のド−ピング方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48103433A (enExample) * | 1972-04-17 | 1973-12-25 | ||
| JPS51102825A (ja) * | 1975-11-13 | 1976-09-10 | Kubota Ltd | Torakutatonozenrinkudosochi |
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1976
- 1976-08-27 JP JP10282676A patent/JPS5328378A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5328378A (en) | 1978-03-16 |