JPS48103433A - - Google Patents
Info
- Publication number
- JPS48103433A JPS48103433A JP3770772A JP3770772A JPS48103433A JP S48103433 A JPS48103433 A JP S48103433A JP 3770772 A JP3770772 A JP 3770772A JP 3770772 A JP3770772 A JP 3770772A JP S48103433 A JPS48103433 A JP S48103433A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3770772A JPS48103433A (enExample) | 1972-04-17 | 1972-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3770772A JPS48103433A (enExample) | 1972-04-17 | 1972-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS48103433A true JPS48103433A (enExample) | 1973-12-25 |
Family
ID=12504983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3770772A Pending JPS48103433A (enExample) | 1972-04-17 | 1972-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS48103433A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5328378A (en) * | 1976-08-27 | 1978-03-16 | Handotai Kenkyu Shinkokai | Method of plasma etching |
| JPS53114679A (en) * | 1977-03-17 | 1978-10-06 | Fujitsu Ltd | Plasm etching unit |
| JPS54101978U (enExample) * | 1978-10-09 | 1979-07-18 | ||
| JPS56130970A (en) * | 1980-03-17 | 1981-10-14 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
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1972
- 1972-04-17 JP JP3770772A patent/JPS48103433A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5328378A (en) * | 1976-08-27 | 1978-03-16 | Handotai Kenkyu Shinkokai | Method of plasma etching |
| JPS53114679A (en) * | 1977-03-17 | 1978-10-06 | Fujitsu Ltd | Plasm etching unit |
| JPS54101978U (enExample) * | 1978-10-09 | 1979-07-18 | ||
| JPS56130970A (en) * | 1980-03-17 | 1981-10-14 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |