JPS54101978U - - Google Patents
Info
- Publication number
- JPS54101978U JPS54101978U JP13786678U JP13786678U JPS54101978U JP S54101978 U JPS54101978 U JP S54101978U JP 13786678 U JP13786678 U JP 13786678U JP 13786678 U JP13786678 U JP 13786678U JP S54101978 U JPS54101978 U JP S54101978U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978137866U JPS595972Y2 (ja) | 1978-10-09 | 1978-10-09 | プラズマエツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978137866U JPS595972Y2 (ja) | 1978-10-09 | 1978-10-09 | プラズマエツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54101978U true JPS54101978U (enExample) | 1979-07-18 |
| JPS595972Y2 JPS595972Y2 (ja) | 1984-02-23 |
Family
ID=29110476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978137866U Expired JPS595972Y2 (ja) | 1978-10-09 | 1978-10-09 | プラズマエツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS595972Y2 (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3661747A (en) * | 1969-08-11 | 1972-05-09 | Bell Telephone Labor Inc | Method for etching thin film materials by direct cathodic back sputtering |
| JPS48103433A (enExample) * | 1972-04-17 | 1973-12-25 | ||
| JPS4957775A (enExample) * | 1972-10-02 | 1974-06-05 |
-
1978
- 1978-10-09 JP JP1978137866U patent/JPS595972Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3661747A (en) * | 1969-08-11 | 1972-05-09 | Bell Telephone Labor Inc | Method for etching thin film materials by direct cathodic back sputtering |
| JPS48103433A (enExample) * | 1972-04-17 | 1973-12-25 | ||
| JPS4957775A (enExample) * | 1972-10-02 | 1974-06-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS595972Y2 (ja) | 1984-02-23 |