JPS5729933A - Analytical apparatus for concentration of gas - Google Patents

Analytical apparatus for concentration of gas

Info

Publication number
JPS5729933A
JPS5729933A JP10593280A JP10593280A JPS5729933A JP S5729933 A JPS5729933 A JP S5729933A JP 10593280 A JP10593280 A JP 10593280A JP 10593280 A JP10593280 A JP 10593280A JP S5729933 A JPS5729933 A JP S5729933A
Authority
JP
Japan
Prior art keywords
laser
voltage
laser beam
automatic frequency
operation amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10593280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216371B2 (enrdf_load_stackoverflow
Inventor
Hirobumi Kashiwara
Tadatami Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10593280A priority Critical patent/JPS5729933A/ja
Publication of JPS5729933A publication Critical patent/JPS5729933A/ja
Publication of JPS6216371B2 publication Critical patent/JPS6216371B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP10593280A 1980-07-31 1980-07-31 Analytical apparatus for concentration of gas Granted JPS5729933A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10593280A JPS5729933A (en) 1980-07-31 1980-07-31 Analytical apparatus for concentration of gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10593280A JPS5729933A (en) 1980-07-31 1980-07-31 Analytical apparatus for concentration of gas

Publications (2)

Publication Number Publication Date
JPS5729933A true JPS5729933A (en) 1982-02-18
JPS6216371B2 JPS6216371B2 (enrdf_load_stackoverflow) 1987-04-13

Family

ID=14420618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10593280A Granted JPS5729933A (en) 1980-07-31 1980-07-31 Analytical apparatus for concentration of gas

Country Status (1)

Country Link
JP (1) JPS5729933A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5923035A (en) * 1997-04-04 1999-07-13 Dragerwerk Ag Infrared absorption measuring device
US6493086B1 (en) 1995-10-10 2002-12-10 American Air Liquide, Inc. Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006118347A1 (ja) 2005-04-28 2006-11-09 Toyota Jidosha Kabushiki Kaisha 排ガス分析装置
JP2009216385A (ja) * 2006-05-19 2009-09-24 Toyota Motor Corp ガス分析装置及びガス分析装置におけるレーザの波長掃引制御方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6493086B1 (en) 1995-10-10 2002-12-10 American Air Liquide, Inc. Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
US5923035A (en) * 1997-04-04 1999-07-13 Dragerwerk Ag Infrared absorption measuring device

Also Published As

Publication number Publication date
JPS6216371B2 (enrdf_load_stackoverflow) 1987-04-13

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