JPS6431004A - Measuring method for gap between reflectors - Google Patents
Measuring method for gap between reflectorsInfo
- Publication number
- JPS6431004A JPS6431004A JP18726287A JP18726287A JPS6431004A JP S6431004 A JPS6431004 A JP S6431004A JP 18726287 A JP18726287 A JP 18726287A JP 18726287 A JP18726287 A JP 18726287A JP S6431004 A JPS6431004 A JP S6431004A
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- interferometer
- enter
- light
- reflectors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To enable the measurement of a gap between reflectors of a Fabry-Perot interferometer in a short time, by a method wherein the frequency of a coherent light from frequency-stabilized rays is shifted successively and made to enter the interferometer. CONSTITUTION:A light emitted from a semiconductor laser 1 is made to enter an acoustooptic modulator 2 so that the frequency thereof be shifted, while a control device 4 controls a voltage control oscillator 3 to vary the driving frequency of the modulator 2 successively. An output light of the modulator 2 is made to enter a Fabry- Perot interferometer 5 accommodated in a vacuum tank 6, so as to be subjected to wavelength discrimination, and an optical power of the light transmitted therethrough is detected by a photodetector 7. Meanwhile, a peak detector 8 receives an output electric signal of the detector 7 and an output of the oscillator 3 as inputs, detecting the frequency of the oscillator 3 whereat an output electric signal takes a peak value, and outputting the same to an arithmetic device 9. After two frequencies corresponding to the peak value are obtained, a computed value of a gap between reflectors of the interferometer 5 is outputted from the device 9 and displayed in a display device 10. Accordingly, only one light source is required to be used as the standard, no introduction of nitrogen or the like is needed, and the analysis of data can be performed on a real time basis.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18726287A JPS6431004A (en) | 1987-07-27 | 1987-07-27 | Measuring method for gap between reflectors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18726287A JPS6431004A (en) | 1987-07-27 | 1987-07-27 | Measuring method for gap between reflectors |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6431004A true JPS6431004A (en) | 1989-02-01 |
Family
ID=16202898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18726287A Pending JPS6431004A (en) | 1987-07-27 | 1987-07-27 | Measuring method for gap between reflectors |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6431004A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04276505A (en) * | 1991-03-04 | 1992-10-01 | Matsushita Electric Ind Co Ltd | Reflecting-point measuring method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5817305A (en) * | 1981-07-24 | 1983-02-01 | Hitachi Ltd | Device for measuring magnetic head spacing |
-
1987
- 1987-07-27 JP JP18726287A patent/JPS6431004A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5817305A (en) * | 1981-07-24 | 1983-02-01 | Hitachi Ltd | Device for measuring magnetic head spacing |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04276505A (en) * | 1991-03-04 | 1992-10-01 | Matsushita Electric Ind Co Ltd | Reflecting-point measuring method |
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