JPS6431004A - Measuring method for gap between reflectors - Google Patents

Measuring method for gap between reflectors

Info

Publication number
JPS6431004A
JPS6431004A JP18726287A JP18726287A JPS6431004A JP S6431004 A JPS6431004 A JP S6431004A JP 18726287 A JP18726287 A JP 18726287A JP 18726287 A JP18726287 A JP 18726287A JP S6431004 A JPS6431004 A JP S6431004A
Authority
JP
Japan
Prior art keywords
frequency
interferometer
enter
light
reflectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18726287A
Other languages
Japanese (ja)
Inventor
Toshitsugu Ueda
Eiji Ogita
Katsuya Ikezawa
Shunji Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP18726287A priority Critical patent/JPS6431004A/en
Publication of JPS6431004A publication Critical patent/JPS6431004A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enable the measurement of a gap between reflectors of a Fabry-Perot interferometer in a short time, by a method wherein the frequency of a coherent light from frequency-stabilized rays is shifted successively and made to enter the interferometer. CONSTITUTION:A light emitted from a semiconductor laser 1 is made to enter an acoustooptic modulator 2 so that the frequency thereof be shifted, while a control device 4 controls a voltage control oscillator 3 to vary the driving frequency of the modulator 2 successively. An output light of the modulator 2 is made to enter a Fabry- Perot interferometer 5 accommodated in a vacuum tank 6, so as to be subjected to wavelength discrimination, and an optical power of the light transmitted therethrough is detected by a photodetector 7. Meanwhile, a peak detector 8 receives an output electric signal of the detector 7 and an output of the oscillator 3 as inputs, detecting the frequency of the oscillator 3 whereat an output electric signal takes a peak value, and outputting the same to an arithmetic device 9. After two frequencies corresponding to the peak value are obtained, a computed value of a gap between reflectors of the interferometer 5 is outputted from the device 9 and displayed in a display device 10. Accordingly, only one light source is required to be used as the standard, no introduction of nitrogen or the like is needed, and the analysis of data can be performed on a real time basis.
JP18726287A 1987-07-27 1987-07-27 Measuring method for gap between reflectors Pending JPS6431004A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18726287A JPS6431004A (en) 1987-07-27 1987-07-27 Measuring method for gap between reflectors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18726287A JPS6431004A (en) 1987-07-27 1987-07-27 Measuring method for gap between reflectors

Publications (1)

Publication Number Publication Date
JPS6431004A true JPS6431004A (en) 1989-02-01

Family

ID=16202898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18726287A Pending JPS6431004A (en) 1987-07-27 1987-07-27 Measuring method for gap between reflectors

Country Status (1)

Country Link
JP (1) JPS6431004A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04276505A (en) * 1991-03-04 1992-10-01 Matsushita Electric Ind Co Ltd Reflecting-point measuring method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817305A (en) * 1981-07-24 1983-02-01 Hitachi Ltd Device for measuring magnetic head spacing

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817305A (en) * 1981-07-24 1983-02-01 Hitachi Ltd Device for measuring magnetic head spacing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04276505A (en) * 1991-03-04 1992-10-01 Matsushita Electric Ind Co Ltd Reflecting-point measuring method

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