JPS5729017A - Manufacture of light guide - Google Patents

Manufacture of light guide

Info

Publication number
JPS5729017A
JPS5729017A JP10415880A JP10415880A JPS5729017A JP S5729017 A JPS5729017 A JP S5729017A JP 10415880 A JP10415880 A JP 10415880A JP 10415880 A JP10415880 A JP 10415880A JP S5729017 A JPS5729017 A JP S5729017A
Authority
JP
Japan
Prior art keywords
quartz
layer
tube
light guide
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10415880A
Other languages
Japanese (ja)
Inventor
Eizo Miyauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10415880A priority Critical patent/JPS5729017A/en
Publication of JPS5729017A publication Critical patent/JPS5729017A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To manufacture a light guide with low loss for an optical integrated circuit in a short time by forming the 1st pure quartz layer on a substrate of silicon, quartz or the like, cutting the pattern grooves 3 of the guide in the layer, and forming the 2nd quartz layer having a higher refractive index than the pure quartz layer. CONSTITUTION:A substrate 1 of silicon, quartz or the like is put in a quartz tube and fixed. SiCl4 and O2 are fed to the tube in about 1:10 ratio and heated to deposit pure quartz soot, and the soot is vitrified in an electric furnace to form the 1st pure quartz layer 2. After cutting desired pattern grooves 3 in the layer 2 by ion milling, plasma etching or other method, the substrate 1 is put in the quartz tube again. SiCl4, GeCl4 and O2 are then fed to the tube in about 5:1:10 ratio and heated to form the 2nd quartz layer 4 having 1.47-1.48 refractive index which is higher than the index of the layer 2. Thus, a light guide with low loss can be manufactured in a short time.
JP10415880A 1980-07-29 1980-07-29 Manufacture of light guide Pending JPS5729017A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10415880A JPS5729017A (en) 1980-07-29 1980-07-29 Manufacture of light guide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10415880A JPS5729017A (en) 1980-07-29 1980-07-29 Manufacture of light guide

Publications (1)

Publication Number Publication Date
JPS5729017A true JPS5729017A (en) 1982-02-16

Family

ID=14373247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10415880A Pending JPS5729017A (en) 1980-07-29 1980-07-29 Manufacture of light guide

Country Status (1)

Country Link
JP (1) JPS5729017A (en)

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