JPS5728415A - Electrode film construction of quartz oscillator - Google Patents

Electrode film construction of quartz oscillator

Info

Publication number
JPS5728415A
JPS5728415A JP10401680A JP10401680A JPS5728415A JP S5728415 A JPS5728415 A JP S5728415A JP 10401680 A JP10401680 A JP 10401680A JP 10401680 A JP10401680 A JP 10401680A JP S5728415 A JPS5728415 A JP S5728415A
Authority
JP
Japan
Prior art keywords
shape
electrode film
film
layer
metallic film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10401680A
Other languages
English (en)
Inventor
Masaaki Sagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP10401680A priority Critical patent/JPS5728415A/ja
Publication of JPS5728415A publication Critical patent/JPS5728415A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP10401680A 1980-07-29 1980-07-29 Electrode film construction of quartz oscillator Pending JPS5728415A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10401680A JPS5728415A (en) 1980-07-29 1980-07-29 Electrode film construction of quartz oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10401680A JPS5728415A (en) 1980-07-29 1980-07-29 Electrode film construction of quartz oscillator

Publications (1)

Publication Number Publication Date
JPS5728415A true JPS5728415A (en) 1982-02-16

Family

ID=14369455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10401680A Pending JPS5728415A (en) 1980-07-29 1980-07-29 Electrode film construction of quartz oscillator

Country Status (1)

Country Link
JP (1) JPS5728415A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005223719A (ja) * 2004-02-06 2005-08-18 Seiko Epson Corp エッチング方法およびこれを利用した圧電デバイスと圧電振動片の製造方法、ならびに電喰抑制パターンの構造
JP2013255052A (ja) * 2012-06-06 2013-12-19 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法
JP2020025344A (ja) * 2019-11-15 2020-02-13 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005223719A (ja) * 2004-02-06 2005-08-18 Seiko Epson Corp エッチング方法およびこれを利用した圧電デバイスと圧電振動片の製造方法、ならびに電喰抑制パターンの構造
JP2013255052A (ja) * 2012-06-06 2013-12-19 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法
US9450166B2 (en) 2012-06-06 2016-09-20 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, mobile body and method of manufacturing resonator element
US10147867B2 (en) 2012-06-06 2018-12-04 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, mobile body and method of manufacturing resonator element
US10680158B2 (en) 2012-06-06 2020-06-09 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, mobile body and method of manufacturing resonator element
US11495727B2 (en) 2012-06-06 2022-11-08 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, mobile body and method of manufacturing resonator element
JP2020025344A (ja) * 2019-11-15 2020-02-13 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法

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