JPS5727213A - Dielectric multilayer film mirror - Google Patents

Dielectric multilayer film mirror

Info

Publication number
JPS5727213A
JPS5727213A JP10295380A JP10295380A JPS5727213A JP S5727213 A JPS5727213 A JP S5727213A JP 10295380 A JP10295380 A JP 10295380A JP 10295380 A JP10295380 A JP 10295380A JP S5727213 A JPS5727213 A JP S5727213A
Authority
JP
Japan
Prior art keywords
refractive index
layer
dielectric multilayer
dielectric
multilayer film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10295380A
Other languages
Japanese (ja)
Inventor
Jun Osawa
Jun Ishii
Ryoichi Hirano
Wataru Suzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10295380A priority Critical patent/JPS5727213A/en
Publication of JPS5727213A publication Critical patent/JPS5727213A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
    • G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • Lasers (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

PURPOSE:To obtain a dielectric multilayer mirror having a high reflection factor and a wide reflected wave length area, by a few layers, by preparing a layer having a low refractive index, by use of SiO2, and preparing a layer having a high refractive index, by use of amorphous Si(a-Si). CONSTITUTION:A dielectric multilayer mirror consisting of 4 dielectric layers is obtained by forming alternately a dielectric layer 21 having a low refractive index, consisting of SiO2, and a dielectric layer 22 having a high refractive index, consisting of a-Si, which has been prepared under the vacuum condition for forming an amorphous a-Si layer having a high refractive index, on a GaAs substrate 3.
JP10295380A 1980-07-26 1980-07-26 Dielectric multilayer film mirror Pending JPS5727213A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10295380A JPS5727213A (en) 1980-07-26 1980-07-26 Dielectric multilayer film mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10295380A JPS5727213A (en) 1980-07-26 1980-07-26 Dielectric multilayer film mirror

Publications (1)

Publication Number Publication Date
JPS5727213A true JPS5727213A (en) 1982-02-13

Family

ID=14341168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10295380A Pending JPS5727213A (en) 1980-07-26 1980-07-26 Dielectric multilayer film mirror

Country Status (1)

Country Link
JP (1) JPS5727213A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077480A (en) * 1983-10-04 1985-05-02 Matsushita Electric Ind Co Ltd Semiconductor laser device
JPH0246789A (en) * 1988-07-01 1990-02-16 Philips Gloeilampenfab:Nv Phi coating of dfb/dbr laser diode
JPH0252479A (en) * 1988-08-16 1990-02-22 Mitsubishi Kasei Corp Etched-mirror type compound semiconductor laser device
WO2002041049A3 (en) * 2000-11-17 2002-07-25 Tebaid Mirror with highly selective reflection band
JP2016186539A (en) * 2015-03-27 2016-10-27 株式会社豊田中央研究所 Optical filter and optical measurement apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077480A (en) * 1983-10-04 1985-05-02 Matsushita Electric Ind Co Ltd Semiconductor laser device
JPH0246789A (en) * 1988-07-01 1990-02-16 Philips Gloeilampenfab:Nv Phi coating of dfb/dbr laser diode
JPH0252479A (en) * 1988-08-16 1990-02-22 Mitsubishi Kasei Corp Etched-mirror type compound semiconductor laser device
WO2002041049A3 (en) * 2000-11-17 2002-07-25 Tebaid Mirror with highly selective reflection band
JP2016186539A (en) * 2015-03-27 2016-10-27 株式会社豊田中央研究所 Optical filter and optical measurement apparatus

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