JPS5726173A - Etching apparatus - Google Patents

Etching apparatus

Info

Publication number
JPS5726173A
JPS5726173A JP10006180A JP10006180A JPS5726173A JP S5726173 A JPS5726173 A JP S5726173A JP 10006180 A JP10006180 A JP 10006180A JP 10006180 A JP10006180 A JP 10006180A JP S5726173 A JPS5726173 A JP S5726173A
Authority
JP
Japan
Prior art keywords
liq
pipe
temp
constant
soln
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10006180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6410596B2 (OSRAM
Inventor
Yuji Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP10006180A priority Critical patent/JPS5726173A/ja
Publication of JPS5726173A publication Critical patent/JPS5726173A/ja
Publication of JPS6410596B2 publication Critical patent/JPS6410596B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP10006180A 1980-07-22 1980-07-22 Etching apparatus Granted JPS5726173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10006180A JPS5726173A (en) 1980-07-22 1980-07-22 Etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10006180A JPS5726173A (en) 1980-07-22 1980-07-22 Etching apparatus

Publications (2)

Publication Number Publication Date
JPS5726173A true JPS5726173A (en) 1982-02-12
JPS6410596B2 JPS6410596B2 (OSRAM) 1989-02-22

Family

ID=14263947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10006180A Granted JPS5726173A (en) 1980-07-22 1980-07-22 Etching apparatus

Country Status (1)

Country Link
JP (1) JPS5726173A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006057154A (ja) * 2004-08-23 2006-03-02 Matsushita Electric Ind Co Ltd コンデンサ用電極箔の製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006057154A (ja) * 2004-08-23 2006-03-02 Matsushita Electric Ind Co Ltd コンデンサ用電極箔の製造装置

Also Published As

Publication number Publication date
JPS6410596B2 (OSRAM) 1989-02-22

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