JPS5722114A - Preparation of thin boron-silicon plate - Google Patents

Preparation of thin boron-silicon plate

Info

Publication number
JPS5722114A
JPS5722114A JP9365480A JP9365480A JPS5722114A JP S5722114 A JPS5722114 A JP S5722114A JP 9365480 A JP9365480 A JP 9365480A JP 9365480 A JP9365480 A JP 9365480A JP S5722114 A JPS5722114 A JP S5722114A
Authority
JP
Japan
Prior art keywords
atomic
boron
silicon
content
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9365480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS636489B2 (cg-RX-API-DMAC7.html
Inventor
Masaki Aoki
Shigeru Yoshida
Shunsuke Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9365480A priority Critical patent/JPS5722114A/ja
Publication of JPS5722114A publication Critical patent/JPS5722114A/ja
Publication of JPS636489B2 publication Critical patent/JPS636489B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Diaphragms For Electromechanical Transducers (AREA)
JP9365480A 1980-07-08 1980-07-08 Preparation of thin boron-silicon plate Granted JPS5722114A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9365480A JPS5722114A (en) 1980-07-08 1980-07-08 Preparation of thin boron-silicon plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9365480A JPS5722114A (en) 1980-07-08 1980-07-08 Preparation of thin boron-silicon plate

Publications (2)

Publication Number Publication Date
JPS5722114A true JPS5722114A (en) 1982-02-05
JPS636489B2 JPS636489B2 (cg-RX-API-DMAC7.html) 1988-02-10

Family

ID=14088362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9365480A Granted JPS5722114A (en) 1980-07-08 1980-07-08 Preparation of thin boron-silicon plate

Country Status (1)

Country Link
JP (1) JPS5722114A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144401A (ja) * 1984-08-08 1986-03-04 ティーディーケイ株式会社 耐摩耗層および電子部品
CN107381589A (zh) * 2017-08-10 2017-11-24 东华大学 一种有序介孔硅硼碳氮材料的制备方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144401A (ja) * 1984-08-08 1986-03-04 ティーディーケイ株式会社 耐摩耗層および電子部品
CN107381589A (zh) * 2017-08-10 2017-11-24 东华大学 一种有序介孔硅硼碳氮材料的制备方法
CN107381589B (zh) * 2017-08-10 2019-12-31 东华大学 一种有序介孔硅硼碳氮材料的制备方法

Also Published As

Publication number Publication date
JPS636489B2 (cg-RX-API-DMAC7.html) 1988-02-10

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