JPS57211506A - Non-contact type measuring device for shape of surface - Google Patents

Non-contact type measuring device for shape of surface

Info

Publication number
JPS57211506A
JPS57211506A JP9672781A JP9672781A JPS57211506A JP S57211506 A JPS57211506 A JP S57211506A JP 9672781 A JP9672781 A JP 9672781A JP 9672781 A JP9672781 A JP 9672781A JP S57211506 A JPS57211506 A JP S57211506A
Authority
JP
Japan
Prior art keywords
sample
transfer
shape
focus
transfer block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9672781A
Other languages
English (en)
Inventor
Mitsuyoshi Koizumi
Nobuyuki Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9672781A priority Critical patent/JPS57211506A/ja
Publication of JPS57211506A publication Critical patent/JPS57211506A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
JP9672781A 1981-06-24 1981-06-24 Non-contact type measuring device for shape of surface Pending JPS57211506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9672781A JPS57211506A (en) 1981-06-24 1981-06-24 Non-contact type measuring device for shape of surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9672781A JPS57211506A (en) 1981-06-24 1981-06-24 Non-contact type measuring device for shape of surface

Publications (1)

Publication Number Publication Date
JPS57211506A true JPS57211506A (en) 1982-12-25

Family

ID=14172758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9672781A Pending JPS57211506A (en) 1981-06-24 1981-06-24 Non-contact type measuring device for shape of surface

Country Status (1)

Country Link
JP (1) JPS57211506A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6131911A (ja) * 1984-07-25 1986-02-14 Toshiba Corp 表面検査装置
JPS6275303A (ja) * 1985-09-30 1987-04-07 Yokogawa Electric Corp 変位変換器
US5033856A (en) * 1984-07-05 1991-07-23 Canon Kabushiki Kaisha Three-dimensional shape measuring apparatus
JP2002257932A (ja) * 2001-03-06 2002-09-11 Nippon Telegr & Teleph Corp <Ntt> 反射電磁波検出型イメージング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5616806A (en) * 1979-07-20 1981-02-18 Hitachi Ltd Surface roughness measuring unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5616806A (en) * 1979-07-20 1981-02-18 Hitachi Ltd Surface roughness measuring unit

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5033856A (en) * 1984-07-05 1991-07-23 Canon Kabushiki Kaisha Three-dimensional shape measuring apparatus
JPS6131911A (ja) * 1984-07-25 1986-02-14 Toshiba Corp 表面検査装置
JPH047807B2 (ja) * 1984-07-25 1992-02-13 Tokyo Shibaura Electric Co
JPS6275303A (ja) * 1985-09-30 1987-04-07 Yokogawa Electric Corp 変位変換器
JP2002257932A (ja) * 2001-03-06 2002-09-11 Nippon Telegr & Teleph Corp <Ntt> 反射電磁波検出型イメージング装置

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