JPS57211231A - Mark detector for electron beam exposure device - Google Patents

Mark detector for electron beam exposure device

Info

Publication number
JPS57211231A
JPS57211231A JP9628681A JP9628681A JPS57211231A JP S57211231 A JPS57211231 A JP S57211231A JP 9628681 A JP9628681 A JP 9628681A JP 9628681 A JP9628681 A JP 9628681A JP S57211231 A JPS57211231 A JP S57211231A
Authority
JP
Japan
Prior art keywords
signals
mark
supplied
accumulated
converted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9628681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6226173B2 (enExample
Inventor
Takao Namae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP9628681A priority Critical patent/JPS57211231A/ja
Publication of JPS57211231A publication Critical patent/JPS57211231A/ja
Publication of JPS6226173B2 publication Critical patent/JPS6226173B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP9628681A 1981-06-22 1981-06-22 Mark detector for electron beam exposure device Granted JPS57211231A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9628681A JPS57211231A (en) 1981-06-22 1981-06-22 Mark detector for electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9628681A JPS57211231A (en) 1981-06-22 1981-06-22 Mark detector for electron beam exposure device

Publications (2)

Publication Number Publication Date
JPS57211231A true JPS57211231A (en) 1982-12-25
JPS6226173B2 JPS6226173B2 (enExample) 1987-06-08

Family

ID=14160846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9628681A Granted JPS57211231A (en) 1981-06-22 1981-06-22 Mark detector for electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS57211231A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58122725A (ja) * 1982-01-14 1983-07-21 Nippon Telegr & Teleph Corp <Ntt> ビ−ム形状測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58122725A (ja) * 1982-01-14 1983-07-21 Nippon Telegr & Teleph Corp <Ntt> ビ−ム形状測定装置

Also Published As

Publication number Publication date
JPS6226173B2 (enExample) 1987-06-08

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