JPS57201043A - Wafer conveying device - Google Patents

Wafer conveying device

Info

Publication number
JPS57201043A
JPS57201043A JP8491181A JP8491181A JPS57201043A JP S57201043 A JPS57201043 A JP S57201043A JP 8491181 A JP8491181 A JP 8491181A JP 8491181 A JP8491181 A JP 8491181A JP S57201043 A JPS57201043 A JP S57201043A
Authority
JP
Japan
Prior art keywords
wafer
magazine
belt conveyor
conveyed
elevating means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8491181A
Other languages
Japanese (ja)
Inventor
Shoichi Kodama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8491181A priority Critical patent/JPS57201043A/en
Publication of JPS57201043A publication Critical patent/JPS57201043A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Feeding Of Articles To Conveyors (AREA)

Abstract

PURPOSE:To enable to match indexes between the steps by longitudinally providing slits for holding wafers, and conveying the wafer through the slits of elevationally moving inlet side and output side magazines from the previous step to the following step. CONSTITUTION:A wafer 4 fed from the previous step is conveyed via a belt conveyor 6a to an inlet side magazine 1a. When the wafer 4 is led to one slit of the magazine 1a, the magazine 1a is raised by elevating means by a pitch. Thus, the magazine 1a is lowered by the elevating means, and the wafer 4 is conveyed sequentially from the lower side via the belt conveyor 6a. The conveyed wafer 4 is similarly held by the output side magazine 1b, and is fed sequentially via the belt conveyor 6b to the following step.
JP8491181A 1981-06-04 1981-06-04 Wafer conveying device Pending JPS57201043A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8491181A JPS57201043A (en) 1981-06-04 1981-06-04 Wafer conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8491181A JPS57201043A (en) 1981-06-04 1981-06-04 Wafer conveying device

Publications (1)

Publication Number Publication Date
JPS57201043A true JPS57201043A (en) 1982-12-09

Family

ID=13843905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8491181A Pending JPS57201043A (en) 1981-06-04 1981-06-04 Wafer conveying device

Country Status (1)

Country Link
JP (1) JPS57201043A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4597819A (en) * 1984-02-29 1986-07-01 Tomco Mfg., Ltd. Apparatus for altering pitch in arrangement of wafers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4597819A (en) * 1984-02-29 1986-07-01 Tomco Mfg., Ltd. Apparatus for altering pitch in arrangement of wafers

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