JPS55163857A - Pool device for semiconductor wafer carrier - Google Patents

Pool device for semiconductor wafer carrier

Info

Publication number
JPS55163857A
JPS55163857A JP7279479A JP7279479A JPS55163857A JP S55163857 A JPS55163857 A JP S55163857A JP 7279479 A JP7279479 A JP 7279479A JP 7279479 A JP7279479 A JP 7279479A JP S55163857 A JPS55163857 A JP S55163857A
Authority
JP
Japan
Prior art keywords
carrier
semiconductor wafer
flange
frame
insides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7279479A
Other languages
Japanese (ja)
Inventor
Masatoshi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7279479A priority Critical patent/JPS55163857A/en
Publication of JPS55163857A publication Critical patent/JPS55163857A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Abstract

PURPOSE:To stereoscopically pool a semiconductor wafer by engaging a frame elevationally movable with the flange of a semiconductor wafer carrier at the insides of both sides thereof and providing a bridge for raising the carrier. CONSTITUTION:A carrier 2 having a flange 3 for containing an conveying semiconductor wafer 4 is conveyed with a belt conveyor 1. Both side plates 6 provided laterally at the belt conveyor 1 and a stay 7 are elevationally movable with a feed thread 11 and a motor 12, key-state bridges 8a-8c are provided at the insides of both side plates 6, and a light shielding plate 13 perforated with holes 14a-15c is provided thereat. There are provided light emitting unit 16, 17 and photoreceptors at both sides of the plate 13. When pooling the carrier 2, the frame 5 is raised to stop the flange 3 of the carrier 2 with the key of the bridge 8a, and the frame 5 is further raised to raise and retain the flange 3.
JP7279479A 1979-06-08 1979-06-08 Pool device for semiconductor wafer carrier Pending JPS55163857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7279479A JPS55163857A (en) 1979-06-08 1979-06-08 Pool device for semiconductor wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7279479A JPS55163857A (en) 1979-06-08 1979-06-08 Pool device for semiconductor wafer carrier

Publications (1)

Publication Number Publication Date
JPS55163857A true JPS55163857A (en) 1980-12-20

Family

ID=13499644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7279479A Pending JPS55163857A (en) 1979-06-08 1979-06-08 Pool device for semiconductor wafer carrier

Country Status (1)

Country Link
JP (1) JPS55163857A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6558101B2 (en) 2001-02-22 2003-05-06 Daifuku Co., Ltd. Article storage system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6558101B2 (en) 2001-02-22 2003-05-06 Daifuku Co., Ltd. Article storage system

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