JPS57200873A - Probing apparatus - Google Patents

Probing apparatus

Info

Publication number
JPS57200873A
JPS57200873A JP8644881A JP8644881A JPS57200873A JP S57200873 A JPS57200873 A JP S57200873A JP 8644881 A JP8644881 A JP 8644881A JP 8644881 A JP8644881 A JP 8644881A JP S57200873 A JPS57200873 A JP S57200873A
Authority
JP
Japan
Prior art keywords
heads
elements
members
semiconductor elements
lowered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8644881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6139629B2 (enExample
Inventor
Masashi Takada
Hisashi Sukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8644881A priority Critical patent/JPS57200873A/ja
Publication of JPS57200873A publication Critical patent/JPS57200873A/ja
Publication of JPS6139629B2 publication Critical patent/JPS6139629B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP8644881A 1981-06-05 1981-06-05 Probing apparatus Granted JPS57200873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8644881A JPS57200873A (en) 1981-06-05 1981-06-05 Probing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8644881A JPS57200873A (en) 1981-06-05 1981-06-05 Probing apparatus

Publications (2)

Publication Number Publication Date
JPS57200873A true JPS57200873A (en) 1982-12-09
JPS6139629B2 JPS6139629B2 (enExample) 1986-09-04

Family

ID=13887204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8644881A Granted JPS57200873A (en) 1981-06-05 1981-06-05 Probing apparatus

Country Status (1)

Country Link
JP (1) JPS57200873A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS634368U (enExample) * 1986-06-27 1988-01-12

Also Published As

Publication number Publication date
JPS6139629B2 (enExample) 1986-09-04

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