JPS57200784A - Vacuum control valve - Google Patents

Vacuum control valve

Info

Publication number
JPS57200784A
JPS57200784A JP8438481A JP8438481A JPS57200784A JP S57200784 A JPS57200784 A JP S57200784A JP 8438481 A JP8438481 A JP 8438481A JP 8438481 A JP8438481 A JP 8438481A JP S57200784 A JPS57200784 A JP S57200784A
Authority
JP
Japan
Prior art keywords
etching chamber
valve
conductance
cylinder
vacuum control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8438481A
Other languages
Japanese (ja)
Inventor
Yoshimasa Unno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8438481A priority Critical patent/JPS57200784A/en
Publication of JPS57200784A publication Critical patent/JPS57200784A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Taps Or Cocks (AREA)
  • Details Of Valves (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE:To enable to make a vacuum control valve in small-sized and light weight by a method wherein a part of a member for connecting an etching chamber to an exhaust pump is utilized as a conductance valve. CONSTITUTION:In case the etching chamber 1 is made vacuous for the purpose of purging gases therein, a hollow cylinder 6 is rotated by a drive motor 11 so that the conductance of the cylinder 6 becomes maximum. That is, the piston of a hole 5 in a main valve box 3 comes into exact coincidence with a cutout section of the cylinder 6. Next, a cover 8 of the main valve box 3 is opened and an exhaust air pump 12 is operated for a predetermined period of time to thereby evacuate the etching chamber at a high speed. Thus, a part of the member connecting the etching chamber 1 to the exhaust pump 12 is utilized as the conductance valve to thereby enable the size and weight of the valve to be reduced.
JP8438481A 1981-06-03 1981-06-03 Vacuum control valve Pending JPS57200784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8438481A JPS57200784A (en) 1981-06-03 1981-06-03 Vacuum control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8438481A JPS57200784A (en) 1981-06-03 1981-06-03 Vacuum control valve

Publications (1)

Publication Number Publication Date
JPS57200784A true JPS57200784A (en) 1982-12-09

Family

ID=13829059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8438481A Pending JPS57200784A (en) 1981-06-03 1981-06-03 Vacuum control valve

Country Status (1)

Country Link
JP (1) JPS57200784A (en)

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