JPS57198453A - Formation of picture - Google Patents

Formation of picture

Info

Publication number
JPS57198453A
JPS57198453A JP8413381A JP8413381A JPS57198453A JP S57198453 A JPS57198453 A JP S57198453A JP 8413381 A JP8413381 A JP 8413381A JP 8413381 A JP8413381 A JP 8413381A JP S57198453 A JPS57198453 A JP S57198453A
Authority
JP
Japan
Prior art keywords
pattern
picture
picture formation
formation layer
development
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8413381A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0360110B2 (enrdf_load_stackoverflow
Inventor
Masanori Akata
Ryohei Takiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP8413381A priority Critical patent/JPS57198453A/ja
Publication of JPS57198453A publication Critical patent/JPS57198453A/ja
Publication of JPH0360110B2 publication Critical patent/JPH0360110B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP8413381A 1981-05-30 1981-05-30 Formation of picture Granted JPS57198453A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8413381A JPS57198453A (en) 1981-05-30 1981-05-30 Formation of picture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8413381A JPS57198453A (en) 1981-05-30 1981-05-30 Formation of picture

Publications (2)

Publication Number Publication Date
JPS57198453A true JPS57198453A (en) 1982-12-06
JPH0360110B2 JPH0360110B2 (enrdf_load_stackoverflow) 1991-09-12

Family

ID=13821999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8413381A Granted JPS57198453A (en) 1981-05-30 1981-05-30 Formation of picture

Country Status (1)

Country Link
JP (1) JPS57198453A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0387838A (ja) * 1989-08-31 1991-04-12 Fuji Photo Film Co Ltd 半導体製造用のポジ型フオトレジスト用現像液

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0387838A (ja) * 1989-08-31 1991-04-12 Fuji Photo Film Co Ltd 半導体製造用のポジ型フオトレジスト用現像液

Also Published As

Publication number Publication date
JPH0360110B2 (enrdf_load_stackoverflow) 1991-09-12

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