JPS57197875A - Manufacture of amorphous silicon solar cell - Google Patents
Manufacture of amorphous silicon solar cellInfo
- Publication number
- JPS57197875A JPS57197875A JP56083432A JP8343281A JPS57197875A JP S57197875 A JPS57197875 A JP S57197875A JP 56083432 A JP56083432 A JP 56083432A JP 8343281 A JP8343281 A JP 8343281A JP S57197875 A JPS57197875 A JP S57197875A
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- decomposing
- electric field
- magnetic pole
- solar cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021417 amorphous silicon Inorganic materials 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 230000005684 electric field Effects 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 150000004678 hydrides Chemical class 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
PURPOSE:To improve characteristics and productivity by manufacturing the amorphous Si solar cell through a glow discharge decomposing method in a glow discharge decomposing oven, which has a magnetic field crossing at right angles with a rf electric field and to the rf electric field thereof a substrate is arranged vertically. CONSTITUTION:In the glow discharge decomposing oven in which the magnetic field 4 formed by a central columnar magnetic pole and a torus-shaped magnetic pole of the outer circumference of said magnetic pole crosses at right angles with the rf electric field 5 by mounting said magnetic poles to the back of the flat-shaped cathode of a parallel slat electrode formed by a cathode 1 connected to a rf power supply and a ground 2, on which the substrate 3 is placed, while being paired, an amorphous SiP I-N junction optical electromotive force element is manufactured by glow discharge-decomposing the hydride or fluoride of Si. Accordingly, the efficiency of photoelectric conversion is improved while the speed of film formation is increased.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56083432A JPS57197875A (en) | 1981-05-29 | 1981-05-29 | Manufacture of amorphous silicon solar cell |
| DE8282104609T DE3280026D1 (en) | 1981-05-29 | 1982-05-27 | Process for preparing amorphous silicon semiconductor |
| EP82104609A EP0066787B1 (en) | 1981-05-29 | 1982-05-27 | Process for preparing amorphous silicon semiconductor |
| US06/701,645 US4582721A (en) | 1981-05-29 | 1985-02-14 | Process for preparing amorphous silicon semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56083432A JPS57197875A (en) | 1981-05-29 | 1981-05-29 | Manufacture of amorphous silicon solar cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57197875A true JPS57197875A (en) | 1982-12-04 |
Family
ID=13802270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56083432A Pending JPS57197875A (en) | 1981-05-29 | 1981-05-29 | Manufacture of amorphous silicon solar cell |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57197875A (en) |
-
1981
- 1981-05-29 JP JP56083432A patent/JPS57197875A/en active Pending
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