JPS57194535A - Electrolytic processing for semiconductor substrate - Google Patents
Electrolytic processing for semiconductor substrateInfo
- Publication number
- JPS57194535A JPS57194535A JP56080309A JP8030981A JPS57194535A JP S57194535 A JPS57194535 A JP S57194535A JP 56080309 A JP56080309 A JP 56080309A JP 8030981 A JP8030981 A JP 8030981A JP S57194535 A JPS57194535 A JP S57194535A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- semiconductor substrate
- electrolytic processing
- windows
- anodic oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE:To uniformly form an anodic oxide film by a method wherein a semiconductor substrate is contacted to one of the windows provided on the conductive member that was covered by an insulating film having two windows, and an electrolytic processing is performed by connecting a lead wire, linking with the anode, to the other window. CONSTITUTION:A thermal oxide film is formed on an Si substrate 11, two windows are formed, an Au-Si alloy layer is provided on the exposed surface which will be used as a contact section 13, a compound semiconductor substrate 14 is contacted to one of the contact sections. Then, a lead wire which is linking with the anode-side electrode of a DC power source 19 is connected to the other contact section, an electrolytic processing is performed by dipping the above in an electrolyte 17 together with a cathode electrode plate 18, and an anodic oxide film is formed. Accordingly, a uniform anodic oxide film can be formed, and the adhesion of dust on the surface of the substrate can also be prevented.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56080309A JPS57194535A (en) | 1981-05-25 | 1981-05-25 | Electrolytic processing for semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56080309A JPS57194535A (en) | 1981-05-25 | 1981-05-25 | Electrolytic processing for semiconductor substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57194535A true JPS57194535A (en) | 1982-11-30 |
Family
ID=13714664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56080309A Pending JPS57194535A (en) | 1981-05-25 | 1981-05-25 | Electrolytic processing for semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57194535A (en) |
-
1981
- 1981-05-25 JP JP56080309A patent/JPS57194535A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2016517A1 (en) | Solid state electrochemical cell having microroughened current collector | |
| EP0720188A3 (en) | Heat resistant conducting polymer, solid electrolytic capacitor using the same and method for fabricating such capacitor | |
| GB2160352B (en) | Insulating seal for electrochemical cells | |
| CA2018444A1 (en) | Method for producing solid state electrochemical laminar cell utilizing cathode rolling step | |
| US2711496A (en) | Lead peroxide rectifiers and method of making the same | |
| GB883603A (en) | Improvements in or relating to the surface treatment of silicon carbide | |
| BR8403008A (en) | PROCESS OF MANUFACTURING AN ELECTRODE BY ELECTROCHEMICAL PROCESSES AND CATHODS FOR ELECTRIC HYDROGEN PRODUCTION | |
| JPS57194535A (en) | Electrolytic processing for semiconductor substrate | |
| GB1326270A (en) | Method of etching surfaces comprising tin oxide | |
| JPS6486527A (en) | Ccb tape carrier | |
| US1844928A (en) | Copper oxide rectifier | |
| JPS5775467A (en) | Substrage for solar battery | |
| DE50112722D1 (en) | METHOD FOR PRODUCING AN ELECTRICALLY CONDUCTIVE CONTACT SURFACE ON A METALLIC SUBSTRATE FOR A FUEL CELL | |
| GB991824A (en) | Improvements in or relating to methods of forming electrical connections | |
| US3502554A (en) | Method for forming thin films | |
| JPS56158424A (en) | Electrolytic copper plating for compound semiconductor | |
| GB1478388A (en) | Electrolytic capacitor | |
| FR2360689A1 (en) | Mounting for chlorine-alkali cell anodes - with a steel conductor plate vibration-soldered to the titanium base plate | |
| GB1503795A (en) | Electrolytic devices | |
| US3471378A (en) | Method of manufacturing elemental part for dry type electrolytic condenser | |
| JPS6439711A (en) | Manufacture of solid electrolytic capacitor | |
| JPS54128685A (en) | Macromolecular film converter | |
| FR2038549A5 (en) | Lead battery anode from paste by galvano- - plastic method | |
| JPS6486417A (en) | Contact and manufacture thereof | |
| ES8801567A3 (en) | Method of preparation of a photovoltaic cell generator of current. (Machine-translation by Google Translate, not legally binding) |