JPS57189443A - Lens power supply controller - Google Patents

Lens power supply controller

Info

Publication number
JPS57189443A
JPS57189443A JP7540581A JP7540581A JPS57189443A JP S57189443 A JPS57189443 A JP S57189443A JP 7540581 A JP7540581 A JP 7540581A JP 7540581 A JP7540581 A JP 7540581A JP S57189443 A JPS57189443 A JP S57189443A
Authority
JP
Japan
Prior art keywords
power supply
lens power
switched
memory
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7540581A
Other languages
Japanese (ja)
Inventor
Setsuo Norioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP7540581A priority Critical patent/JPS57189443A/en
Publication of JPS57189443A publication Critical patent/JPS57189443A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Abstract

PURPOSE:To enable easy focussing by configuring a lens power supply controller with memory which stores data, a select switch which can be switched into the automatic and manual operation, and a control section which adds and subtracts the data value by means of a stepping switch when it is switched. CONSTITUTION:Memory 3 which stores the excitation data that is sent to a lens power supply 1 stores data corresponding to addresses (a) to (e).... A stepping switch 4 which is stepping-actuated by a manual operation and a select switch 5 which is switched into the automatic and manual operation are provided. When the select switch 5 is switched into the automatic operation, the excitation data is sequentially sent to the lens power supply 1 from the addresses (a) to (e)... of the memory 3 by using a control section 6. As a result, beginners can easily perform focussing.
JP7540581A 1981-05-19 1981-05-19 Lens power supply controller Pending JPS57189443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7540581A JPS57189443A (en) 1981-05-19 1981-05-19 Lens power supply controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7540581A JPS57189443A (en) 1981-05-19 1981-05-19 Lens power supply controller

Publications (1)

Publication Number Publication Date
JPS57189443A true JPS57189443A (en) 1982-11-20

Family

ID=13575228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7540581A Pending JPS57189443A (en) 1981-05-19 1981-05-19 Lens power supply controller

Country Status (1)

Country Link
JP (1) JPS57189443A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018113171A (en) * 2017-01-12 2018-07-19 日本電子株式会社 Method for adjusting focus of charged particle beam apparatus, and charged particle beam apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018113171A (en) * 2017-01-12 2018-07-19 日本電子株式会社 Method for adjusting focus of charged particle beam apparatus, and charged particle beam apparatus

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