JPS57186101A - Thickness measuring device - Google Patents

Thickness measuring device

Info

Publication number
JPS57186101A
JPS57186101A JP7013081A JP7013081A JPS57186101A JP S57186101 A JPS57186101 A JP S57186101A JP 7013081 A JP7013081 A JP 7013081A JP 7013081 A JP7013081 A JP 7013081A JP S57186101 A JPS57186101 A JP S57186101A
Authority
JP
Japan
Prior art keywords
measured
plane
thickness
base
stamper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7013081A
Other languages
Japanese (ja)
Inventor
Katsuyoshi Tamaki
Junichi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7013081A priority Critical patent/JPS57186101A/en
Publication of JPS57186101A publication Critical patent/JPS57186101A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/087—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring of objects while moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To improve the precision of the thickness measurement of a thin plate of a stamper, etc., for the manufacture of a video disk, by suctionally fixing said thin plate on a plane by meagneic force, and then measuring its thickness by a noncontacting sensor. CONSTITUTION:A discoidal sucking jig base 7 is held rotatably around the shaft 5 of a supporting base 6 on a base 2. A groove is formed in the top surface of the jig base 7, and the other surface 10 is a reference plane 10 for holding a body 9 to be measured such as a stamper, etc., for the manufacture of a video disk. The body 9 to be measured is a magnetic material, and attracted by an electromagnet 11 to correct its curvature and undulation on the plane 10. One of gripping parts 13 of a holder 14 for electrostatic capacity type thickness detectors 15 and 16 is inserted into the groove 8. The holder is moved by a feed screw 18 which rotates by a pulse motor 21, and the detectors are also moved, while holding invariably constant intervals with the body to be measured, to perform measurement.
JP7013081A 1981-05-12 1981-05-12 Thickness measuring device Pending JPS57186101A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7013081A JPS57186101A (en) 1981-05-12 1981-05-12 Thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7013081A JPS57186101A (en) 1981-05-12 1981-05-12 Thickness measuring device

Publications (1)

Publication Number Publication Date
JPS57186101A true JPS57186101A (en) 1982-11-16

Family

ID=13422665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7013081A Pending JPS57186101A (en) 1981-05-12 1981-05-12 Thickness measuring device

Country Status (1)

Country Link
JP (1) JPS57186101A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100368247B1 (en) * 1995-12-30 2003-03-28 주식회사 포스코 Device for sensing number of steel sheets by magnetic flux change
KR100376494B1 (en) * 1995-12-30 2003-05-22 주식회사 포스코 Apparatus and method for detecting number of steel plates by using variation of magnetic permeability of electromagnetic core
JP2006510024A (en) * 2002-12-13 2006-03-23 アプライド　マテリアルズ　インコーポレイテッド Method and apparatus for measuring the thickness of a test object between two eddy current sensor heads
JP2007108147A (en) * 2005-10-17 2007-04-26 Justem:Kk Method for measuring capacitive thickness multipoint and its device
JP2008008778A (en) * 2006-06-29 2008-01-17 Kobe Steel Ltd Shape measurement method of flaky measuring object, and device therefor
KR100916107B1 (en) * 2007-12-27 2009-09-08 주식회사 포스코 Apparatus for measuring thickness of steel plate
KR101064468B1 (en) * 2008-12-02 2011-09-15 주식회사 포스코 Apparatus for measuring the thickness
TWI410619B (en) * 2006-12-11 2013-10-01 Fih Hong Kong Ltd Coplanarity test plate
CN104359391A (en) * 2014-12-12 2015-02-18 张卫东 Detecting device for reinforced concrete protective layer measurer and floor thickness measurer
CN105203062A (en) * 2015-08-31 2015-12-30 杭州市质量技术监督检测院 Automatic detecting device for steel bar protective layer thickness measuring instrument
JPWO2022054605A1 (en) * 2020-09-10 2022-03-17

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5349455A (en) * 1976-10-18 1978-05-04 Idec Izumi Corp Automatic discriminating apparatus for thickness of steel plate
JPS5534266B2 (en) * 1977-05-11 1980-09-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5349455A (en) * 1976-10-18 1978-05-04 Idec Izumi Corp Automatic discriminating apparatus for thickness of steel plate
JPS5534266B2 (en) * 1977-05-11 1980-09-05

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100368247B1 (en) * 1995-12-30 2003-03-28 주식회사 포스코 Device for sensing number of steel sheets by magnetic flux change
KR100376494B1 (en) * 1995-12-30 2003-05-22 주식회사 포스코 Apparatus and method for detecting number of steel plates by using variation of magnetic permeability of electromagnetic core
JP2006510024A (en) * 2002-12-13 2006-03-23 アプライド　マテリアルズ　インコーポレイテッド Method and apparatus for measuring the thickness of a test object between two eddy current sensor heads
JP4501137B2 (en) * 2005-10-17 2010-07-14 株式会社ジャステム Capacitance type thickness multipoint measuring method and apparatus
JP2007108147A (en) * 2005-10-17 2007-04-26 Justem:Kk Method for measuring capacitive thickness multipoint and its device
JP2008008778A (en) * 2006-06-29 2008-01-17 Kobe Steel Ltd Shape measurement method of flaky measuring object, and device therefor
TWI410619B (en) * 2006-12-11 2013-10-01 Fih Hong Kong Ltd Coplanarity test plate
KR100916107B1 (en) * 2007-12-27 2009-09-08 주식회사 포스코 Apparatus for measuring thickness of steel plate
KR101064468B1 (en) * 2008-12-02 2011-09-15 주식회사 포스코 Apparatus for measuring the thickness
CN104359391A (en) * 2014-12-12 2015-02-18 张卫东 Detecting device for reinforced concrete protective layer measurer and floor thickness measurer
CN104359391B (en) * 2014-12-12 2017-01-25 张卫东 Detecting device for reinforced concrete protective layer measurer and floor thickness measurer
CN105203062A (en) * 2015-08-31 2015-12-30 杭州市质量技术监督检测院 Automatic detecting device for steel bar protective layer thickness measuring instrument
JPWO2022054605A1 (en) * 2020-09-10 2022-03-17

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