JPS57182813A - Cold trap temperature controller - Google Patents

Cold trap temperature controller

Info

Publication number
JPS57182813A
JPS57182813A JP6915281A JP6915281A JPS57182813A JP S57182813 A JPS57182813 A JP S57182813A JP 6915281 A JP6915281 A JP 6915281A JP 6915281 A JP6915281 A JP 6915281A JP S57182813 A JPS57182813 A JP S57182813A
Authority
JP
Japan
Prior art keywords
heating
cooling
time
temperature
preliminarily
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6915281A
Other languages
Japanese (ja)
Other versions
JPH0234047B2 (en
Inventor
Takao Kato
Yasuo Kida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6915281A priority Critical patent/JPH0234047B2/en
Publication of JPS57182813A publication Critical patent/JPS57182813A/en
Publication of JPH0234047B2 publication Critical patent/JPH0234047B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1927—Control of temperature characterised by the use of electric means using a plurality of sensors
    • G05D23/193—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces
    • G05D23/1931—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of one space

Landscapes

  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Temperature (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Feedback Control In General (AREA)

Abstract

PURPOSE:To reduce the waste of time in comparison with the time management control due to a timer and to cool and heat preliminarily a cooling medium and a heating medium in the shortest time, by monitoring directly a heat exchange quantity and selecting and controlling the temperature of a cold trap group. CONSTITUTION:The first deviation operating means 311 which operates a heat exchange quantity in a cold trap (CT) part on a basis of the temperature difference of a cooling medium or a heating medium before and after preliminary cooling or heating of every CT part and the second deviation operating means 316 which obtains a temperature deviation on a basis of temperatures 37 and 38 of every CT part and time program temperatures 317 and 318 at a preliminarily cooling or heating time are provided. Further, means 319, 304, and 320 are provided which confirm that temperature signals 37 and 38 in every CT part at a preliminarily cooling or heating time become set temperature to select outputs of deviation operating means 311 and 316 and change operation parameters and perform the PID operation to control a regulating valve for preliminarily cooling or heating.
JP6915281A 1981-05-08 1981-05-08 KOORUDOTORATSUPUONDOSEIGYOSOCHI Expired - Lifetime JPH0234047B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6915281A JPH0234047B2 (en) 1981-05-08 1981-05-08 KOORUDOTORATSUPUONDOSEIGYOSOCHI

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6915281A JPH0234047B2 (en) 1981-05-08 1981-05-08 KOORUDOTORATSUPUONDOSEIGYOSOCHI

Publications (2)

Publication Number Publication Date
JPS57182813A true JPS57182813A (en) 1982-11-10
JPH0234047B2 JPH0234047B2 (en) 1990-08-01

Family

ID=13394403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6915281A Expired - Lifetime JPH0234047B2 (en) 1981-05-08 1981-05-08 KOORUDOTORATSUPUONDOSEIGYOSOCHI

Country Status (1)

Country Link
JP (1) JPH0234047B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100484881B1 (en) * 2002-06-17 2005-04-22 동부아남반도체 주식회사 Apparatus for monitoring temperature of cold trap for pvd chamber formed a vacuum
JP2009530083A (en) * 2006-03-14 2009-08-27 プラクスエア・テクノロジー・インコーポレイテッド Selective separation process

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104199479B (en) * 2014-08-20 2016-06-29 浙江华亿工程设计有限公司 Stepless temperature control system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100484881B1 (en) * 2002-06-17 2005-04-22 동부아남반도체 주식회사 Apparatus for monitoring temperature of cold trap for pvd chamber formed a vacuum
JP2009530083A (en) * 2006-03-14 2009-08-27 プラクスエア・テクノロジー・インコーポレイテッド Selective separation process

Also Published As

Publication number Publication date
JPH0234047B2 (en) 1990-08-01

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