JPS57181373A - Vacuum deposition device - Google Patents

Vacuum deposition device

Info

Publication number
JPS57181373A
JPS57181373A JP6338681A JP6338681A JPS57181373A JP S57181373 A JPS57181373 A JP S57181373A JP 6338681 A JP6338681 A JP 6338681A JP 6338681 A JP6338681 A JP 6338681A JP S57181373 A JPS57181373 A JP S57181373A
Authority
JP
Japan
Prior art keywords
roller
incident angles
belt
vapor deposition
damaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6338681A
Other languages
Japanese (ja)
Inventor
Soichi Matsuzaki
Minoru Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lincstech Circuit Co Ltd
Original Assignee
Hitachi Condenser Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Condenser Co Ltd filed Critical Hitachi Condenser Co Ltd
Priority to JP6338681A priority Critical patent/JPS57181373A/en
Publication of JPS57181373A publication Critical patent/JPS57181373A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To make the vapor deposition of high incident angles possible without damaging a belt-like body by providing a displacement roller which can change position between a supply roller and a back roller, thereby making the incident angle for vapor deposition of the belt-like body controllable. CONSTITUTION:In a cylindrical vacuum deposition tank 21 connected to a vacuum system (not shown) via a projection 22, a belt-like body 24 such as plastic film travels between a supply roller 23 and a take-up roller 25. A displacement roller 29 which can change position and a back roller 26 which cools the body 24 are provided between these rollers. The evaporating material 33 from a crucible 32 is limited of the vapor deposition angle by a mask 31, and the greater part thereof is vapor-deposited on the body 24 at high incident angles and part thereof at low incident angles in the part of the roller 26. Coercive force and angular ratios are controlled by changing the incident angles by the position of the roller 29. The body 24 is cooled by a cooler 30 and the roller 26, by which its damaging is prevented.
JP6338681A 1981-04-28 1981-04-28 Vacuum deposition device Pending JPS57181373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6338681A JPS57181373A (en) 1981-04-28 1981-04-28 Vacuum deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6338681A JPS57181373A (en) 1981-04-28 1981-04-28 Vacuum deposition device

Publications (1)

Publication Number Publication Date
JPS57181373A true JPS57181373A (en) 1982-11-08

Family

ID=13227801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6338681A Pending JPS57181373A (en) 1981-04-28 1981-04-28 Vacuum deposition device

Country Status (1)

Country Link
JP (1) JPS57181373A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952434A (en) * 1982-09-17 1984-03-27 Dainippon Printing Co Ltd Manufacturing device of magnetic recording medium
WO1989001230A1 (en) * 1987-07-30 1989-02-09 Matsushita Electric Industrial Co., Ltd. Electrolytic capacitor and production method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952434A (en) * 1982-09-17 1984-03-27 Dainippon Printing Co Ltd Manufacturing device of magnetic recording medium
WO1989001230A1 (en) * 1987-07-30 1989-02-09 Matsushita Electric Industrial Co., Ltd. Electrolytic capacitor and production method thereof

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