JPS57176016A - Ultrasonic microscope - Google Patents

Ultrasonic microscope

Info

Publication number
JPS57176016A
JPS57176016A JP56059664A JP5966481A JPS57176016A JP S57176016 A JPS57176016 A JP S57176016A JP 56059664 A JP56059664 A JP 56059664A JP 5966481 A JP5966481 A JP 5966481A JP S57176016 A JPS57176016 A JP S57176016A
Authority
JP
Japan
Prior art keywords
sample
microscope
revolver
optical microscope
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56059664A
Other languages
Japanese (ja)
Other versions
JPH0427498B2 (en
Inventor
Koji Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP56059664A priority Critical patent/JPS57176016A/en
Publication of JPS57176016A publication Critical patent/JPS57176016A/en
Publication of JPH0427498B2 publication Critical patent/JPH0427498B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE:To facilitate switching between an optical and an ultrasonic microscope by providing a convergent ultrasonic wave transmitting and receiving element for scanning a sample at a high speed to one of lens mounts of the revolver of the optical microscope. CONSTITUTION:A scanning part 16 having a convergent ultrasonic wave is fitted to one of objective lenses 3, provided to the revolver 2 of an optical microscope, through a mount 19. The element 4 is put in high-speed reciprocating motion in a direction (x) over a sample 6 on a sample base 5 by a small-sized driving mechanism 17 through an arm 18, and a moving table 20 is moved at a low speed in a direction (y) by an unshown driving mechanism, enabling the optical microscope as an ultrasonic microscope. In this case, the revolver is rotated to observe the sample through a desired objective lens, so that positioning for observation by switching between the both is facilitated.
JP56059664A 1981-04-22 1981-04-22 Ultrasonic microscope Granted JPS57176016A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56059664A JPS57176016A (en) 1981-04-22 1981-04-22 Ultrasonic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56059664A JPS57176016A (en) 1981-04-22 1981-04-22 Ultrasonic microscope

Publications (2)

Publication Number Publication Date
JPS57176016A true JPS57176016A (en) 1982-10-29
JPH0427498B2 JPH0427498B2 (en) 1992-05-12

Family

ID=13119684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56059664A Granted JPS57176016A (en) 1981-04-22 1981-04-22 Ultrasonic microscope

Country Status (1)

Country Link
JP (1) JPS57176016A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0139967A2 (en) * 1983-09-30 1985-05-08 Ernst Leitz Wetzlar Gmbh Method and apparatus for the performance of several complementary microscopic investigations
US4614410A (en) * 1983-09-28 1986-09-30 Hitachi, Ltd. Ultrasonic microscope with optical microscope incorporated therein
JP2004535600A (en) * 2001-07-19 2004-11-25 カール ツアイス マイクロエレクトロニック システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング Microscope objective and the use of this microscope objective in a microscope
WO2012023255A1 (en) * 2010-08-18 2012-02-23 Canon Kabushiki Kaisha Microscope
JP2012123416A (en) * 2012-03-12 2012-06-28 Canon Inc Processing method of object
EP3805752A1 (en) * 2019-10-07 2021-04-14 The Boeing Company Multi-probe non-destructive inspection system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4614410A (en) * 1983-09-28 1986-09-30 Hitachi, Ltd. Ultrasonic microscope with optical microscope incorporated therein
EP0139967A2 (en) * 1983-09-30 1985-05-08 Ernst Leitz Wetzlar Gmbh Method and apparatus for the performance of several complementary microscopic investigations
JPS6093411A (en) * 1983-09-30 1985-05-25 ライカ　インドゥストリーフェルヴァルツング　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング Method and apparatus for implementing a few microscope-oriented tests mutually complementary
JP2004535600A (en) * 2001-07-19 2004-11-25 カール ツアイス マイクロエレクトロニック システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツング Microscope objective and the use of this microscope objective in a microscope
WO2012023255A1 (en) * 2010-08-18 2012-02-23 Canon Kabushiki Kaisha Microscope
JP2012123416A (en) * 2012-03-12 2012-06-28 Canon Inc Processing method of object
EP3805752A1 (en) * 2019-10-07 2021-04-14 The Boeing Company Multi-probe non-destructive inspection system
US11187527B2 (en) 2019-10-07 2021-11-30 The Boeing Company Multi-probe non-destructive inspection system
US11781862B2 (en) 2019-10-07 2023-10-10 The Boeing Company Multi-probe non-destructive inspection system

Also Published As

Publication number Publication date
JPH0427498B2 (en) 1992-05-12

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