JPS57170899A - Manufacture of ggg single crystal - Google Patents

Manufacture of ggg single crystal

Info

Publication number
JPS57170899A
JPS57170899A JP5524181A JP5524181A JPS57170899A JP S57170899 A JPS57170899 A JP S57170899A JP 5524181 A JP5524181 A JP 5524181A JP 5524181 A JP5524181 A JP 5524181A JP S57170899 A JPS57170899 A JP S57170899A
Authority
JP
Japan
Prior art keywords
crystal
melt
single crystal
ggg
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5524181A
Other languages
Japanese (ja)
Other versions
JPS5933557B2 (en
Inventor
Shigeo Endo
Kohei Ito
Fumio Nitanda
Katsuhiko Kojo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP5524181A priority Critical patent/JPS5933557B2/en
Publication of JPS57170899A publication Critical patent/JPS57170899A/en
Publication of JPS5933557B2 publication Critical patent/JPS5933557B2/en
Expired legal-status Critical Current

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To obtain a crystal free from a crack and almost free from crystal defects in the growth of a GGG single crystal with the Czochralski method, by adding a specified amount of quardrivalent ions of Ge or Si to Gd2O3 and Ga2O3 as starting materials.
CONSTITUTION: Gd2O3 is mixed with Ga2O3 in 3:5W3.05:4.95 molar ratio and melted by heating. A seed crystal rod of single crystal GGG is put in the melt, and a chemically inert atmosphere is formed on the melt surface. The seed crystal rod is slowly pulled up so that the melt is solidified in the rod and crystallized, and a GGG single crystal having the same axis as the seed crystal and a circular section is grown. At this time, to the powdered starting materials or the melt are added ≤30ppm by weight of ions of at least one of Ge and Si. Thus, the locally inetense strain of a bowl is relieved, cracking is prevented during bowl cooling and slicing, and inclusions on the surface of a wafer and crystal defects such as dislocation can be reduced.
COPYRIGHT: (C)1982,JPO&Japio
JP5524181A 1981-04-13 1981-04-13 Method of manufacturing GGG single crystal Expired JPS5933557B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5524181A JPS5933557B2 (en) 1981-04-13 1981-04-13 Method of manufacturing GGG single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5524181A JPS5933557B2 (en) 1981-04-13 1981-04-13 Method of manufacturing GGG single crystal

Publications (2)

Publication Number Publication Date
JPS57170899A true JPS57170899A (en) 1982-10-21
JPS5933557B2 JPS5933557B2 (en) 1984-08-16

Family

ID=12993096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5524181A Expired JPS5933557B2 (en) 1981-04-13 1981-04-13 Method of manufacturing GGG single crystal

Country Status (1)

Country Link
JP (1) JPS5933557B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006289433A (en) * 2005-04-11 2006-10-26 Amino:Kk Safety device for press

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63201817A (en) * 1987-02-18 1988-08-19 Toyota Motor Corp Waveform measuring instrument for vehicle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006289433A (en) * 2005-04-11 2006-10-26 Amino:Kk Safety device for press

Also Published As

Publication number Publication date
JPS5933557B2 (en) 1984-08-16

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