JPS57170899A - Manufacture of ggg single crystal - Google Patents
Manufacture of ggg single crystalInfo
- Publication number
- JPS57170899A JPS57170899A JP5524181A JP5524181A JPS57170899A JP S57170899 A JPS57170899 A JP S57170899A JP 5524181 A JP5524181 A JP 5524181A JP 5524181 A JP5524181 A JP 5524181A JP S57170899 A JPS57170899 A JP S57170899A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- melt
- single crystal
- ggg
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain a crystal free from a crack and almost free from crystal defects in the growth of a GGG single crystal with the Czochralski method, by adding a specified amount of quardrivalent ions of Ge or Si to Gd2O3 and Ga2O3 as starting materials.
CONSTITUTION: Gd2O3 is mixed with Ga2O3 in 3:5W3.05:4.95 molar ratio and melted by heating. A seed crystal rod of single crystal GGG is put in the melt, and a chemically inert atmosphere is formed on the melt surface. The seed crystal rod is slowly pulled up so that the melt is solidified in the rod and crystallized, and a GGG single crystal having the same axis as the seed crystal and a circular section is grown. At this time, to the powdered starting materials or the melt are added ≤30ppm by weight of ions of at least one of Ge and Si. Thus, the locally inetense strain of a bowl is relieved, cracking is prevented during bowl cooling and slicing, and inclusions on the surface of a wafer and crystal defects such as dislocation can be reduced.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5524181A JPS5933557B2 (en) | 1981-04-13 | 1981-04-13 | Method of manufacturing GGG single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5524181A JPS5933557B2 (en) | 1981-04-13 | 1981-04-13 | Method of manufacturing GGG single crystal |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57170899A true JPS57170899A (en) | 1982-10-21 |
JPS5933557B2 JPS5933557B2 (en) | 1984-08-16 |
Family
ID=12993096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5524181A Expired JPS5933557B2 (en) | 1981-04-13 | 1981-04-13 | Method of manufacturing GGG single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5933557B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006289433A (en) * | 2005-04-11 | 2006-10-26 | Amino:Kk | Safety device for press |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63201817A (en) * | 1987-02-18 | 1988-08-19 | Toyota Motor Corp | Waveform measuring instrument for vehicle |
-
1981
- 1981-04-13 JP JP5524181A patent/JPS5933557B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006289433A (en) * | 2005-04-11 | 2006-10-26 | Amino:Kk | Safety device for press |
Also Published As
Publication number | Publication date |
---|---|
JPS5933557B2 (en) | 1984-08-16 |
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