JPS57170807A - Manufacture of alpha-type silicon nitride powder - Google Patents
Manufacture of alpha-type silicon nitride powderInfo
- Publication number
- JPS57170807A JPS57170807A JP5301581A JP5301581A JPS57170807A JP S57170807 A JPS57170807 A JP S57170807A JP 5301581 A JP5301581 A JP 5301581A JP 5301581 A JP5301581 A JP 5301581A JP S57170807 A JPS57170807 A JP S57170807A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- powder
- type silicon
- manufacture
- nitride powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title abstract 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title abstract 6
- 239000000843 powder Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000203 mixture Substances 0.000 abstract 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 3
- 239000012299 nitrogen atmosphere Substances 0.000 abstract 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 2
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 abstract 2
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 238000002156 mixing Methods 0.000 abstract 1
- 238000005121 nitriding Methods 0.000 abstract 1
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5301581A JPS57170807A (en) | 1981-04-10 | 1981-04-10 | Manufacture of alpha-type silicon nitride powder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5301581A JPS57170807A (en) | 1981-04-10 | 1981-04-10 | Manufacture of alpha-type silicon nitride powder |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57170807A true JPS57170807A (en) | 1982-10-21 |
JPH0240606B2 JPH0240606B2 (enrdf_load_stackoverflow) | 1990-09-12 |
Family
ID=12931071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5301581A Granted JPS57170807A (en) | 1981-04-10 | 1981-04-10 | Manufacture of alpha-type silicon nitride powder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57170807A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105047920A (zh) * | 2015-07-03 | 2015-11-11 | 华中科技大学 | 一种氮化硅微米管制造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55113603A (en) * | 1979-02-19 | 1980-09-02 | Toshiba Corp | Manufacture of alpha silicon nitride powder |
-
1981
- 1981-04-10 JP JP5301581A patent/JPS57170807A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55113603A (en) * | 1979-02-19 | 1980-09-02 | Toshiba Corp | Manufacture of alpha silicon nitride powder |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105047920A (zh) * | 2015-07-03 | 2015-11-11 | 华中科技大学 | 一种氮化硅微米管制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0240606B2 (enrdf_load_stackoverflow) | 1990-09-12 |
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