JPS57170807A - Manufacture of alpha-type silicon nitride powder - Google Patents

Manufacture of alpha-type silicon nitride powder

Info

Publication number
JPS57170807A
JPS57170807A JP5301581A JP5301581A JPS57170807A JP S57170807 A JPS57170807 A JP S57170807A JP 5301581 A JP5301581 A JP 5301581A JP 5301581 A JP5301581 A JP 5301581A JP S57170807 A JPS57170807 A JP S57170807A
Authority
JP
Japan
Prior art keywords
silicon nitride
powder
type silicon
manufacture
nitride powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5301581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0240606B2 (enrdf_load_stackoverflow
Inventor
Akihiko Tsuge
Hiroshi Inoue
Katsutoshi Yoneya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5301581A priority Critical patent/JPS57170807A/ja
Publication of JPS57170807A publication Critical patent/JPS57170807A/ja
Publication of JPH0240606B2 publication Critical patent/JPH0240606B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP5301581A 1981-04-10 1981-04-10 Manufacture of alpha-type silicon nitride powder Granted JPS57170807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5301581A JPS57170807A (en) 1981-04-10 1981-04-10 Manufacture of alpha-type silicon nitride powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5301581A JPS57170807A (en) 1981-04-10 1981-04-10 Manufacture of alpha-type silicon nitride powder

Publications (2)

Publication Number Publication Date
JPS57170807A true JPS57170807A (en) 1982-10-21
JPH0240606B2 JPH0240606B2 (enrdf_load_stackoverflow) 1990-09-12

Family

ID=12931071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5301581A Granted JPS57170807A (en) 1981-04-10 1981-04-10 Manufacture of alpha-type silicon nitride powder

Country Status (1)

Country Link
JP (1) JPS57170807A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105047920A (zh) * 2015-07-03 2015-11-11 华中科技大学 一种氮化硅微米管制造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113603A (en) * 1979-02-19 1980-09-02 Toshiba Corp Manufacture of alpha silicon nitride powder

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113603A (en) * 1979-02-19 1980-09-02 Toshiba Corp Manufacture of alpha silicon nitride powder

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105047920A (zh) * 2015-07-03 2015-11-11 华中科技大学 一种氮化硅微米管制造方法

Also Published As

Publication number Publication date
JPH0240606B2 (enrdf_load_stackoverflow) 1990-09-12

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