JPS57163836A - Measuring device for degree of vacuum - Google Patents

Measuring device for degree of vacuum

Info

Publication number
JPS57163836A
JPS57163836A JP4878281A JP4878281A JPS57163836A JP S57163836 A JPS57163836 A JP S57163836A JP 4878281 A JP4878281 A JP 4878281A JP 4878281 A JP4878281 A JP 4878281A JP S57163836 A JPS57163836 A JP S57163836A
Authority
JP
Japan
Prior art keywords
vacuum
zero
power source
degree
relay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4878281A
Other languages
Japanese (ja)
Inventor
Tsutomu Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP4878281A priority Critical patent/JPS57163836A/en
Publication of JPS57163836A publication Critical patent/JPS57163836A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges

Abstract

PURPOSE:To accurately measure the working pressure of an apparatus which requires a wide pressure range by automatically correcting the zero point of a low-vacuum measurement system when a high-vacuum measurement system measures a degree of vacuum below the lower measurement limit of the low- vacuum measurement system. CONSTITUTION:When the indicated pressure of a B-A type ionization vacuum gauge 6 reaches set pressure below the lower measurement limit of a diaphragm type manometer 11, a B-A type ionization vacuum gauge power source 17 operates a relay 18 to break a contact 19 in a vacuum-degree measurement power source 16, and the output 22 of the diaphragm type manometer 11 is fed back to an automatic zero-point correcting circuit 21 through an amplifier 20 for automatic zero correction so that an output voltage is zero. Then, the power source 17 is turned off and etching gas is introduced. The relay 18 is initialized and the input to the amplifier 20 is held at the earth potential; and the automatic zero-point correcting circuit is placed in a relay operation state, namely, holds a constant under high vacuum all the time.
JP4878281A 1981-04-01 1981-04-01 Measuring device for degree of vacuum Pending JPS57163836A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4878281A JPS57163836A (en) 1981-04-01 1981-04-01 Measuring device for degree of vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4878281A JPS57163836A (en) 1981-04-01 1981-04-01 Measuring device for degree of vacuum

Publications (1)

Publication Number Publication Date
JPS57163836A true JPS57163836A (en) 1982-10-08

Family

ID=12812812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4878281A Pending JPS57163836A (en) 1981-04-01 1981-04-01 Measuring device for degree of vacuum

Country Status (1)

Country Link
JP (1) JPS57163836A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62218834A (en) * 1986-03-20 1987-09-26 Seiko Instr & Electronics Ltd Gas manometer
JPS6393113A (en) * 1986-10-08 1988-04-23 Hitachi Ltd Exhaust system
JPS63189332U (en) * 1987-05-23 1988-12-06

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62218834A (en) * 1986-03-20 1987-09-26 Seiko Instr & Electronics Ltd Gas manometer
JPS6393113A (en) * 1986-10-08 1988-04-23 Hitachi Ltd Exhaust system
JPS63189332U (en) * 1987-05-23 1988-12-06

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