JPS57158378A - Ion working device - Google Patents

Ion working device

Info

Publication number
JPS57158378A
JPS57158378A JP4530281A JP4530281A JPS57158378A JP S57158378 A JPS57158378 A JP S57158378A JP 4530281 A JP4530281 A JP 4530281A JP 4530281 A JP4530281 A JP 4530281A JP S57158378 A JPS57158378 A JP S57158378A
Authority
JP
Japan
Prior art keywords
ion
clusters
working
work
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4530281A
Other languages
Japanese (ja)
Inventor
Kiyoshi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INOUE JAPAX KENKYUSHO KK
Inoue Japax Research Inc
Original Assignee
INOUE JAPAX KENKYUSHO KK
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INOUE JAPAX KENKYUSHO KK, Inoue Japax Research Inc filed Critical INOUE JAPAX KENKYUSHO KK
Priority to JP4530281A priority Critical patent/JPS57158378A/en
Priority to DE8282301592T priority patent/DE3276540D1/en
Priority to DE1982301592 priority patent/DE61906T1/en
Priority to EP82301592A priority patent/EP0061906B1/en
Publication of JPS57158378A publication Critical patent/JPS57158378A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation

Abstract

PURPOSE:To improve woking speed and the properties of formed films by irradiating ions and neutral particles or their clusters altenately or simultaneously with the irradiation heads juxtaposed in an impact chamber thereby working the work. CONSTITUTION:An ion irradiation head 1 and a neutral particle irradiation head 2 are juxtaposed in an impact chamber for ion working. Ions and neutral particles or ion clusters and nutral particle clusters are irradiated alternatly or simultaneously from the heads 1, 2 toward the work 4 placed and fixed on a rotary working table 3. The ions or ion clusters are focused by a focusing electrode 7 under the acceleration by an acceleration voltage 6, and on the other hand, the neutral particles are focused by a cryogenic pump 9 to impinge upon the work 4. In this way, the working speed of ion plating, ion etching or the like is improved and the properties of the formed films are improved.
JP4530281A 1981-03-26 1981-03-26 Ion working device Pending JPS57158378A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP4530281A JPS57158378A (en) 1981-03-26 1981-03-26 Ion working device
DE8282301592T DE3276540D1 (en) 1981-03-26 1982-03-25 A method of, and an apparatus for, processing a workpiece with energetic particles and a product processed thereby
DE1982301592 DE61906T1 (en) 1981-03-26 1982-03-25 METHOD AND DEVICE FOR PROCESSING A WORKPIECE WITH ENERGY-RICH PARTICLES, AND A PRODUCT PROCESSED IN THIS WAY.
EP82301592A EP0061906B1 (en) 1981-03-26 1982-03-25 A method of, and an apparatus for, processing a workpiece with energetic particles and a product processed thereby

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4530281A JPS57158378A (en) 1981-03-26 1981-03-26 Ion working device

Publications (1)

Publication Number Publication Date
JPS57158378A true JPS57158378A (en) 1982-09-30

Family

ID=12715515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4530281A Pending JPS57158378A (en) 1981-03-26 1981-03-26 Ion working device

Country Status (1)

Country Link
JP (1) JPS57158378A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242774A (en) * 1988-03-25 1989-09-27 Toppan Printing Co Ltd Device for forming film with no unevenness

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242774A (en) * 1988-03-25 1989-09-27 Toppan Printing Co Ltd Device for forming film with no unevenness

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