JPS57155746A - Support structure of collet - Google Patents
Support structure of colletInfo
- Publication number
- JPS57155746A JPS57155746A JP56040334A JP4033481A JPS57155746A JP S57155746 A JPS57155746 A JP S57155746A JP 56040334 A JP56040334 A JP 56040334A JP 4033481 A JP4033481 A JP 4033481A JP S57155746 A JPS57155746 A JP S57155746A
- Authority
- JP
- Japan
- Prior art keywords
- collet
- arm
- spring
- shaft
- collet shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0446—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56040334A JPS57155746A (en) | 1981-03-23 | 1981-03-23 | Support structure of collet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56040334A JPS57155746A (en) | 1981-03-23 | 1981-03-23 | Support structure of collet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57155746A true JPS57155746A (en) | 1982-09-25 |
| JPS6329825B2 JPS6329825B2 (https=) | 1988-06-15 |
Family
ID=12577719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56040334A Granted JPS57155746A (en) | 1981-03-23 | 1981-03-23 | Support structure of collet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57155746A (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5011656A (https=) * | 1973-06-01 | 1975-02-06 | ||
| JPS5056877A (https=) * | 1973-09-14 | 1975-05-17 |
-
1981
- 1981-03-23 JP JP56040334A patent/JPS57155746A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5011656A (https=) * | 1973-06-01 | 1975-02-06 | ||
| JPS5056877A (https=) * | 1973-09-14 | 1975-05-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6329825B2 (https=) | 1988-06-15 |
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