JPS57150423A - Gas separating film - Google Patents

Gas separating film

Info

Publication number
JPS57150423A
JPS57150423A JP3627081A JP3627081A JPS57150423A JP S57150423 A JPS57150423 A JP S57150423A JP 3627081 A JP3627081 A JP 3627081A JP 3627081 A JP3627081 A JP 3627081A JP S57150423 A JPS57150423 A JP S57150423A
Authority
JP
Japan
Prior art keywords
film
layer
plasma
thin film
compact layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3627081A
Other languages
English (en)
Inventor
Junichi Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Priority to JP3627081A priority Critical patent/JPS57150423A/ja
Publication of JPS57150423A publication Critical patent/JPS57150423A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)
JP3627081A 1981-03-13 1981-03-13 Gas separating film Pending JPS57150423A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3627081A JPS57150423A (en) 1981-03-13 1981-03-13 Gas separating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3627081A JPS57150423A (en) 1981-03-13 1981-03-13 Gas separating film

Publications (1)

Publication Number Publication Date
JPS57150423A true JPS57150423A (en) 1982-09-17

Family

ID=12465068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3627081A Pending JPS57150423A (en) 1981-03-13 1981-03-13 Gas separating film

Country Status (1)

Country Link
JP (1) JPS57150423A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59115738A (ja) * 1982-12-21 1984-07-04 Sumitomo Electric Ind Ltd ガス選択透過性膜およびその製造方法
JPS6090004A (ja) * 1983-10-22 1985-05-21 Agency Of Ind Science & Technol 気体分離膜
JPS63296822A (ja) * 1987-05-28 1988-12-02 Matsushita Electric Ind Co Ltd 気体分離複合膜
US4902307A (en) * 1988-11-18 1990-02-20 California Institute Of Technology Synthesis of SiO2 membrane on porous support and method of use of same
US5246743A (en) * 1991-11-26 1993-09-21 Ube Industries, Ltd. Method of enhancing gas separation performance of an aromatic polyimide membrane
JPH06277471A (ja) * 1992-10-13 1994-10-04 Deutsche Carbone Ag 合成プラズマ膜の製造方法
JP2017131849A (ja) * 2016-01-29 2017-08-03 国立大学法人広島大学 気体分離フィルタの製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5624018A (en) * 1979-06-25 1981-03-07 Toyota Central Res & Dev Lab Inc Gas separating member and production thereof
JPS5730528A (en) * 1980-07-30 1982-02-18 Toyota Central Res & Dev Lab Inc Vapor-separating member
JPS5781805A (en) * 1980-11-11 1982-05-22 Sumitomo Electric Ind Ltd Gas selective permeable composite membrane and its production
JPS5794304A (en) * 1980-12-03 1982-06-11 Sumitomo Chem Co Ltd Gas separating membrane made of polysulfone hollow fiber and its manufacture

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5624018A (en) * 1979-06-25 1981-03-07 Toyota Central Res & Dev Lab Inc Gas separating member and production thereof
JPS5730528A (en) * 1980-07-30 1982-02-18 Toyota Central Res & Dev Lab Inc Vapor-separating member
JPS5781805A (en) * 1980-11-11 1982-05-22 Sumitomo Electric Ind Ltd Gas selective permeable composite membrane and its production
JPS5794304A (en) * 1980-12-03 1982-06-11 Sumitomo Chem Co Ltd Gas separating membrane made of polysulfone hollow fiber and its manufacture

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59115738A (ja) * 1982-12-21 1984-07-04 Sumitomo Electric Ind Ltd ガス選択透過性膜およびその製造方法
JPS6336286B2 (ja) * 1982-12-21 1988-07-19 Sumitomo Electric Industries
JPS6090004A (ja) * 1983-10-22 1985-05-21 Agency Of Ind Science & Technol 気体分離膜
JPH0363412B2 (ja) * 1983-10-22 1991-10-01 Kogyo Gijutsuin
JPS63296822A (ja) * 1987-05-28 1988-12-02 Matsushita Electric Ind Co Ltd 気体分離複合膜
US4902307A (en) * 1988-11-18 1990-02-20 California Institute Of Technology Synthesis of SiO2 membrane on porous support and method of use of same
US5246743A (en) * 1991-11-26 1993-09-21 Ube Industries, Ltd. Method of enhancing gas separation performance of an aromatic polyimide membrane
JPH06277471A (ja) * 1992-10-13 1994-10-04 Deutsche Carbone Ag 合成プラズマ膜の製造方法
JP2017131849A (ja) * 2016-01-29 2017-08-03 国立大学法人広島大学 気体分離フィルタの製造方法

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