JPS57149837A - Manufacture of quartz glass tube - Google Patents
Manufacture of quartz glass tubeInfo
- Publication number
- JPS57149837A JPS57149837A JP3509481A JP3509481A JPS57149837A JP S57149837 A JPS57149837 A JP S57149837A JP 3509481 A JP3509481 A JP 3509481A JP 3509481 A JP3509481 A JP 3509481A JP S57149837 A JPS57149837 A JP S57149837A
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- flame
- tube
- glass tube
- silicon dioxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
- C03B37/01426—Plasma deposition burners or torches
Abstract
PURPOSE:To easily manufacture a quartz glass tube with high purity and superior transparency by converting a silicon compound into silicon dioxide at a high temp., tubularly depositing the molten devitrification product on a rotating substrate, and growing it in the axial direction. CONSTITUTION:A plasma forming gas is introduced into the inner pipe 3 of a plasma torch, and by applying a high frequency voltage from a high frequency coil 5, a plasma flame 6 is formed. A gaseous silicon compound such as silicon tetrachloride is sprayed on the flame 6 and oxidized at the high temp. of the flame 6 to produce silicon dioxide. This silicon dioxide is converted into molten glass and deposits as quartz glass on a short quartz glass tube 8 attached to a part below the flame 6. The deposition proceeds in the form of a ring with the rotation of the tube 8. By gradualy moving the tube 8 downward with a pulling device 10 as the glass grows in the axial direction, the desired quartz glass tube 9 is obtd.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3509481A JPS57149837A (en) | 1981-03-11 | 1981-03-11 | Manufacture of quartz glass tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3509481A JPS57149837A (en) | 1981-03-11 | 1981-03-11 | Manufacture of quartz glass tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57149837A true JPS57149837A (en) | 1982-09-16 |
Family
ID=12432355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3509481A Pending JPS57149837A (en) | 1981-03-11 | 1981-03-11 | Manufacture of quartz glass tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57149837A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1069083A1 (en) * | 1999-07-05 | 2001-01-17 | Agilent Technologies, Inc., a corporation of the State of Delaware | Process and apparatus for depositing silica glass on a planar substrate using a plasma torch |
-
1981
- 1981-03-11 JP JP3509481A patent/JPS57149837A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1069083A1 (en) * | 1999-07-05 | 2001-01-17 | Agilent Technologies, Inc., a corporation of the State of Delaware | Process and apparatus for depositing silica glass on a planar substrate using a plasma torch |
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