JPS57149746A - Tester for semiconductor substrate - Google Patents
Tester for semiconductor substrateInfo
- Publication number
- JPS57149746A JPS57149746A JP3574481A JP3574481A JPS57149746A JP S57149746 A JPS57149746 A JP S57149746A JP 3574481 A JP3574481 A JP 3574481A JP 3574481 A JP3574481 A JP 3574481A JP S57149746 A JPS57149746 A JP S57149746A
- Authority
- JP
- Japan
- Prior art keywords
- needle
- pad
- tester
- semiconductor substrate
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To stop two-dimensional motion, and to obtain the tester having high performance by mounting an electromagnet directly or indirectly to a base for a test on which the semiconductor substrate is placed. CONSTITUTION:The measuring pad 2a of the semiconductor substrate 2 on the testing base 1 is conformed to the point 3a of a measuring needle 3 fixed in the x and y directions by operating a handle 5 directly coupled with a sliding base 4. After the relative positions in the x and y directions of the pad 2a and the point 3a of the needle agree, the needle 3 is operated in the z direction, its operation is stopped at the time when the point 3a contacts with the pad 2a, and the needle is fixed. The electromagnet 6 incorporated into the handle 5 is conducted under this condition, and the testing base is adsorbed. A slat 7 is made of a ferromagnetic material. According to this constitution, the tester is extremely proper to a test of which the measuring needle must be contacted with the pad for a fixed time because the fixing or non-fixing of the testing base can be conducted through the on-off control of the electromagnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3574481A JPS57149746A (en) | 1981-03-12 | 1981-03-12 | Tester for semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3574481A JPS57149746A (en) | 1981-03-12 | 1981-03-12 | Tester for semiconductor substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57149746A true JPS57149746A (en) | 1982-09-16 |
Family
ID=12450324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3574481A Pending JPS57149746A (en) | 1981-03-12 | 1981-03-12 | Tester for semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57149746A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0284749A (en) * | 1988-06-03 | 1990-03-26 | Tokyo Electron Ltd | Probing device |
| US6127749A (en) * | 1999-02-10 | 2000-10-03 | Nikon Corporation Of Japan | Two-dimensional electric motor |
-
1981
- 1981-03-12 JP JP3574481A patent/JPS57149746A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0284749A (en) * | 1988-06-03 | 1990-03-26 | Tokyo Electron Ltd | Probing device |
| US6127749A (en) * | 1999-02-10 | 2000-10-03 | Nikon Corporation Of Japan | Two-dimensional electric motor |
| US6455956B1 (en) | 1999-02-10 | 2002-09-24 | Nikon Corporation | Two-dimensional electric motor |
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