JPS57136755A - Disc operating device for ion implanting device - Google Patents

Disc operating device for ion implanting device

Info

Publication number
JPS57136755A
JPS57136755A JP2221481A JP2221481A JPS57136755A JP S57136755 A JPS57136755 A JP S57136755A JP 2221481 A JP2221481 A JP 2221481A JP 2221481 A JP2221481 A JP 2221481A JP S57136755 A JPS57136755 A JP S57136755A
Authority
JP
Japan
Prior art keywords
disc
chamber
motor
implantation chamber
wefers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2221481A
Other languages
Japanese (ja)
Inventor
Nobuhiro Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP2221481A priority Critical patent/JPS57136755A/en
Publication of JPS57136755A publication Critical patent/JPS57136755A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To make capable of automatic operations such as removal, rotation, and transfer of a disc by providing a movable sealed chamber for containing a motor to rotate the disc on which wefers are mountd in an ion implantation chamber. CONSTITUTION:A lock chamber 7 the internal pressure of which is optionally changed between vacuum and atmospheric pressure is provided on the side of a vacuum ion implantation chamber 1 through a gate valve 9, and a disc 3 on which wefers are mounted is moved between both chambers using a carriage. A sealed chamber, which contains a motor 32 to rotate the disc 3 and which is movable reciprocatingly on a rail 18, is provided in the implantation chamber 1, on the top of it a rotating shaft 17 provided with an engaging device for engaging removably with the disc 3 is provided removably, and the sealed chamber is lined air-tightly to the external of the implantation chamber 1. Thus dust from the motor 32 can be prevented to infiltrate, and various operations of the disc 3 can be automated easily.
JP2221481A 1981-02-19 1981-02-19 Disc operating device for ion implanting device Pending JPS57136755A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2221481A JPS57136755A (en) 1981-02-19 1981-02-19 Disc operating device for ion implanting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2221481A JPS57136755A (en) 1981-02-19 1981-02-19 Disc operating device for ion implanting device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP57083317A Division JPS581960A (en) 1982-05-19 1982-05-19 Ion implantation chamber device

Publications (1)

Publication Number Publication Date
JPS57136755A true JPS57136755A (en) 1982-08-23

Family

ID=12076547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2221481A Pending JPS57136755A (en) 1981-02-19 1981-02-19 Disc operating device for ion implanting device

Country Status (1)

Country Link
JP (1) JPS57136755A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6247940A (en) * 1985-08-27 1987-03-02 Nec Corp Ion implanting apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104057A (en) * 1979-02-02 1980-08-09 Hitachi Ltd Ion implantation device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104057A (en) * 1979-02-02 1980-08-09 Hitachi Ltd Ion implantation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6247940A (en) * 1985-08-27 1987-03-02 Nec Corp Ion implanting apparatus
JPH0530017B2 (en) * 1985-08-27 1993-05-07 Nippon Electric Co

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